4-2
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 4 Maintenance
Trouble
Possible Cause
Check/Corrective Action
Output stays at 0 Volts
Clogged Sensor.
Clean sensor. Refer to cleaning procedure. Section 4-4.
regardless of flow.
Output signal stays at +6.8V
Defective PC Board.
Replace PC Board. Refer to Section 4-4.
and there is no flow through
the meter.
Defective Sensor.
Replace Sensor Assembly. Refer to Section 4-4.
Meter grossly out of calibration. Partially clogged sensor.
Clean sensor, refer to the cleaning procedure.
Flow is higher than indicated.
Meter grossly out of calibration. Partially clogged restrictor.
Replace restrictor. Refer to Section 4-4.
Flow is lower than indicated.
Meter output oscillates.
Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-4.
Faulty pressure regulator.
Check regulator output.
Defective PC Board.
Replace PC Board. Refer to Section 4-4.
Table 4-1 Bench Troubleshooting
Table 4-2 Sensor Troubleshooting
