1-1
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 1 Introduction
1-1 Purpose
The Brooks
®
Model 5860E Flow Meter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5860E Mass Flow Meter. This manual is
organized into five sections:
Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List
It is recommended that this manual be read in its entirety before attempting
to operate or repair the Model 5860E.
1-2 Description
The Brooks Model 5860E Mass Flow Meter is used widely in the
Semiconductor Industry as well as many others, where manual, electronic
or computer controlled gas handling occurs. The Model 5860E consists of
two basic units: a flow sensor, and an integral electronic signal converter.
This combination produces a stable gas flow indication, which eliminates
the need to continuously monitor and compensate for changing gas
pressures and temperatures. Standard features include:
Fast Response
rapidly indicates changes in actual mass flow rate. Refer
to Figure 1-1.
Removable Cleanable Sensor
permits the user to clean or replace the
sensor. Refer to Section 4-4.
Output Limiting
prevents possible damage to delicate data acquisition
devices by limiting the output to +6.8 Vdc and -.7 Vdc.