2-4
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 2 Installation
Recommended installation procedures:
a. The Model 5860E should be located in a clean dry atmosphere
relatively free from shock and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in such a manner that permits easy removal if the instrument
requires cleaning.
When used with a reactive (sometimes toxic) gas, contamination or
corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
meter purged with dry Nitrogen before use.
d. The Model 5860E Mass Flow Meter can be installed in any position.
However mounting orientations other than the original factory
calibration (see data sheet) will result in a ±0.5% maximum full scale
shift after re-zeroing.
e. When installing flow meters be aware that sharp abrupt angles in the
system piping directly upstream of the meter may cause a small shift
in accuracy. If possible have at least 10 pipe diameters of straight
tubing upstream of the Model 5860E Mass Flow Meter.
2-6 In-Line Filter
It is recommended that an in-line filter be installed upstream from the
flowmeter to prevent the possibility of any foreign material entering the flow
sensor. The filtering element should be replaced periodically or
ultrasonically cleaned.
Table 2-1 Recommended Filter Size
Maximum Flow Rate
Recommended Filter Size
100 sccm
1 micron
500 sccm
2 micron
1 to 5 slpm
7 micron
10 to 30 slpm
15 micron
Note: The above Table lists the maximum recommended porosity for each
flow range. It is recommended that the minimum micron porosity that does
not limit the full scale flowrate be used.
