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Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

Brooks

®

Model 5860E

Section 1 Introduction

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Содержание 5860E

Страница 1: ...Installation and Operation Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E Model 5860E Mass Flow Meter...

Страница 2: ...bstitutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qual...

Страница 3: ...and chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior perform...

Страница 4: ...Installation and Operation Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 5: ...Gas Connections 2 2 2 5 Installation 2 2 2 6 In Line Filter 2 4 2 7 Electrical Interfacing 2 5 Section 3 Operation 3 1 Theory of Operation 3 1 3 2 Operating Procedure 3 2 3 3 Zero Adjustment 3 2 3 4...

Страница 6: ...ow Sensor Operational Diagram 3 2 3 2 Model 5860E Calibration Connections 3 4 3 3 Adjustment Potentiometer Location 3 4 3 4 Fast Response Adjustment 3 4 5 1 Model 5860E Parts Drawing 5 2 Tables Table...

Страница 7: ...ore attempting to operate or repair the Model 5860E 1 2 Description The Brooks Model 5860E Mass Flow Meter is used widely in the Semiconductor Industry as well as many others where manual electronic o...

Страница 8: ...SEMI Semiconductor Equipment and Materials Institute standard 0 C and 101 3 kPa 760 Torr Ratings Maximum Operating pressure 4500 psi 31 03 MPa Ambient Operating Temperature 40 F to 150 F 5 C to 65 C...

Страница 9: ...egree C Span Less than 1 0 F S shift from original calibration over 10 50 C range Pressure Sensitivity 0 03 per PSI up to 200 PSIG Power Supply Sensitivity 0 09 full scale per power supply voltage var...

Страница 10: ...1 4 Installation and Operation Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E Section 1 Introduction THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 11: ...com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 71...

Страница 12: ...0 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com Also completion of Form RPR003 1 Brooks Instr...

Страница 13: ...n Red 4 Valve Off Green 5 15 Vdc Supply Orange 6 15 Vdc Supply Blue 7 Valve Test Point Purge Wht Blk 8 Cmd Input or Cmd Pot S Red Blk 9 Supply Voltage Common Grn Blk 10 0 5 Volt Signal Common Org Blk...

Страница 14: ...the original factory calibration see data sheet will result in a 0 5 maximum full scale shift after re zeroing e When installing flow meters be aware that sharp abrupt angles in the system piping dire...

Страница 15: ...here are several functions on the printed circuit board which are not used by the Model 5860E Avoid making connections marked in Figure 2 2 which are marked Also the plug in jumpers on the printed cir...

Страница 16: ...2 6 Installation and Operation Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E Section 2 Installation THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 17: ...a differential amplifier generates a linear 0 5 Vdc signal directly proportional to the gas mass flow rate The flow restrictor shown in Figure 3 1 performs a ranging function similar to a shunt resis...

Страница 18: ...aboratory which is temperature controlled to 21 1 C 70 F 2 F After initial installation and warm up in the gas system the zero flow indication may be other than the factory setting This is primarily c...

Страница 19: ...Connect the DVM positive lead to the 0 5V signal output pin 2 of the D connector and the negative lead to TP4 Connect the DVM positive lead to TP2 linearity voltage and the negative lead to TP4 signa...

Страница 20: ...Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E Section 3 Operation Figure 3 2 Model 5860E Calibration Connections Figure 3 3 Adjustment Potentiometer Location Figur...

Страница 21: ...error recorded in step g is less than 0 5 then the calibration procedure is complete 2 If the error is greater than 0 5 set the flow rate for a flow signal output of 100 5 000V Connect the DVM positi...

Страница 22: ...state accuracy of the flowmeter as adjusted in Section 3 4 Note This procedure requires an oscilloscope chart recorder or a DVM with a sample speed three samples per second or greater to monitor the...

Страница 23: ...er supply and connect an output signal readout device 4 1 2 digit voltmeter recommended to terminals 2 and 3 D type pins 2 and 10 Refer to Figure 2 2 Apply power and allow the flowmeter to warm up for...

Страница 24: ...Defective Sensor Replace Sensor Assembly Refer to Section 4 4 Meter grossly out of calibration Partially clogged sensor Clean sensor refer to the cleaning procedure Flow is higher than indicated Mete...

Страница 25: ...needle filled with solvent is a convenient means to accomplish this An alternate method for flushing out the sensor is to replace the restrictor element with a low flow plug restrictor This plug forc...

Страница 26: ...hich could result in explosion fire or serious injury 1 Remove the three screws 8 attaching the electronics cover and loosen the upper jack post on the D Connector Remove the elec tronics cover 11 Be...

Страница 27: ...ck up rings 5 into the O ring cavity above the O rings Be sure that the O rings are seated square and the backup rings are below the surface of the body The back end of the O ring removal tool is usef...

Страница 28: ...er is calibrated for Nitrogen The desired gas is Carbon Dioxide The output reading is 75 sccm when Carbon Dioxide is flowing Then 75 x 0 78 58 50 sccm In order to calculate the conversion factor for a...

Страница 29: ...CCLF3 0 430 1 985 4 912 Cyanogen CN 2 0 498 1 366 2 322 Cyanogen Chloride CLCN 0 618 1 480 2 730 Cyclobutane C4 H8 0 387 1 413 2 491 Cyclopropane C3 H6 0 505 1 224 1 877 Deuterium D2 0 995 0 379 0 17...

Страница 30: ...e N2 O 0 752 1 259 1 964 Octofluorocyclobutane C4 F8 0 169 2 672 8 933 Oxygen O2 0 988 1 067 1 429 Oxygen Difluoride OF2 0 672 1 388 2 402 Ozone O3 0 738 1 310 2 138 Pentafluorethane f 125 C2 HF5 0 28...

Страница 31: ...process connec tion Restrictor removal tool contained in service tool kit P N S 778 D 017 AAA Restrictor O ring refer to the spare parts Section 5 for the correct part number Restrictors The Model 586...

Страница 32: ...e is known to precipitate silicon dioxide particles when contaminated an anti clog laminar flow element should be selected for this application NOTE If the calculated flow rate is such that two differ...

Страница 33: ...L 84 56 119 7 S110Z303 S110Z282 M 118 4 167 6 S110Z304 S110Z283 N 165 7 234 7 S110Z305 S110Z284 P 232 0 328 6 S110Z306 S110Z285 Q 324 8 460 0 S110Z307 S110Z286 R 454 8 644 0 S110Z308 S110Z287 S 636 7...

Страница 34: ...4 12 Installation and Operation Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E Section 4 Maintenance THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 35: ...E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E Section 5 Parts List 5 1 General When ordering parts please specify Brooks Serial Number Model Number Part Description Part Number Qua...

Страница 36: ...5 2 Installation and Operation Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E Section 5 Parts List Figure 5 1 Model 5860E Parts Drawing...

Страница 37: ...nnecting Cables Length D type Connector on one end 5 Feet S124Z361AAA with no termination 10 Feet S124Z362AAA NS on other end 25 Feet S124Z363AAA 1 50 Feet S124Z435AAA Connector on one end 5 Feet S124...

Страница 38: ...5 4 Installation and Operation Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E Section 5 Parts List THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 39: ...venlig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung f r Massedurchflu ger te Datum Januar 1996 Nach erf...

Страница 40: ...Please refer to the enclosed Instruction Manual Espa ol Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificaci n CE de los Equipos...

Страница 41: ...l portant le label CE Qualit du c ble des presse toupes et des connecteurs Brooks fournit des c bles de haute qualit r pondant aux sp cifications de la certification CE Si vous approvisionnez vous m m...

Страница 42: ...ollegato ad un terminale di terra Per il corretto cablaggio dei terminali occorre fare riferimento agli schemi del manuale di istruzioni dello strumento Nederlands Brooks Instrument 407 West Vine St H...

Страница 43: ...k jord p riktig pinne i pluggen for m te CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se h ndboken som h rer til utstyret Vennlig hilsen Portugu s Brooks Instrument 407 West Vi...

Страница 44: ...maadoitettu Nastojen liitt minen katso liitteen oleva manuaali Yst v llisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Refe...

Страница 45: ...Installation and Operation Manual X TMF 5860E MFM eng Part Number 541B106AAG November 2008 Brooks Model 5860E THIS PAGE WAS INTENTIONALLY LEFT BLANK...

Страница 46: ...ited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all o...

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