BIRD THRULINE 4020 series, Инструкция

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Introduction
3
4027A Series
Bird 4027A Series Power Sensors are designed for use in semiconductor pro-
cessing and calibration applications. Stringent calibration provides long-term
unit-to-unit repeatability, allowing consistent amounts of RF energy to be
applied to the etch process over many etch cycles. 4027A Sensors are accurate
t o ±1%(1 ) at specified calibration frequencies and power levels.
4027F Series
Bird 4027F Series Power Sensors are similar to the 4027A series. However,
additional filtering allows the 4027F to ignore harmonics of the signal being
measured. The 4027F is also less sensitive to AM components of the signal.
4027F Sen sor s a r e a ccu r a t e t o ±1%(2 ) at specified calibration frequencies
and power levels.
4028 Series
Bird 4028 Series Power Sensors are high power sensors otherwise similar to
±2% a t specified ca libr a t ion fr equ en cies a n d power levels.
Figure 2
Power Sensor
Outline Drawing,
4020, 4027A, 4027F,
and 4028A Series
DIRECTIONAL POWER SENSOR
MODEL 4022
0.3 - 1000 WATTS
25 - 1000 MHz
(95 mm)
(19 mm)
(35 mm)
(64 mm)
(83 mm)
-CAUTION-
SOURCE LOAD
SENSOR PLUG
SOCKET
Figure 3
Power Sensor
Outline Drawing
4028B Series only
SENSOR PLUG
SOCKET
3.75"
(96 mm)
4.75"
(121 mm)
3.5"
(89 mm)
6.75"
(172 mm)
SOURCE LOAD