Adixen ACS 2000 Скачать руководство пользователя страница 59

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GB 03438 - Edition 03 - October 09

A Commissioning
B Product

description

C Settings
D Test

mode

E RS232

mode

F Appendices

Appendix 7

Accessories

Power sockets and

cables

Item Description

P.N

mains cable - Europe - 2m

103566

mains cable - US+Japan - 2m

103567

mains cable - UK - 2m

104411

mains cable - Switzerland - 2m

103718

mains cable - Italy - 2 m

104758

Gauge cables

Adapter kit

series 1000/

series 2000 measuring

range

Length

P.N

5 m

112752

10 m

112753

20 m

112754

Description

P.N

Gauge adapter

113152

Controller adapter

113153

13/16

Содержание ACS 2000

Страница 1: ...ACS 2000 Single channel Controller User s Manual Réalization Publication Alcatel Vacuum Technology France User s Manual Ed 03 Date 09 2010 Part Number 113161 113161 ...

Страница 2: ...st of experienced subsidiaries distributors and agents The first step was the founding of Alcatel Vacuum Products Hingham MA in the United States thirty years ago reinforced today by 2 others US subsidiaries in Fremont CA and Tempe AZ In Europe AVTF France headquarters and its subsidiaries Alcatel Hochvakuumtechnik Germany Alcatel Vacuum Technology UK Scotland Alcatel Vacuum Technology Benelux Net...

Страница 3: ...omer You have just acquired an Adixen ACS 2000 controller We thank you for your purchase and are proud to be able to count you among our customers Alcatel Vacuum Technology has acquired a wast wealth of experience in the design of controllers over the year To guarantee optimum performance and full satisfaction in using this equipment please take the necessary time to become familiar with this manu...

Страница 4: ... Directives are amended by Directive 93 68 EEC CE mark Copyright Intellectual property The use of Adixen products are subject to copyright and intellectual property rights in force in any jurisdiction All rights reserved including copying this document in whole or any part without prior written authorization from Alcatel Vacuum Technology France Specifications and information are subject to change...

Страница 5: ... point management General settings for the ACS 2000 Chapter D Test mode Access to test mode Software version checking Analog Digital converter test Controller display test Memory tests Controller interface tests Chapter E RS232 mode Introduction List of commands Detailed description of RS232 command Chapter F Appendices Appendix 1 Technical characteristics Appendix 2 Dimensions Appendix 3 Rack Ins...

Страница 6: ...acking and storing the controller 5 9 Unpacking Storing the controller Decontamination Product recycling Installation 6 9 Assembly installation Table mounting Rack mounting Power connections Quick commissioning procedure 7 9 Bringing the ACS 2000 on line Start up screen Measurement screen and display Warning or error message Shutting down ...

Страница 7: ...arning is used to indicate a potential risk that can cause significant damage to equipment and or installations if instructions are not followed This type of warning is used to indicate a potential risk that can cause minor injury if instructions are not followed This type of warning is used to indicate a potential risk that can cause serious injury or death if instructions are not followed This t...

Страница 8: ...hese holes are not blocked When switching off equipment containing condensers charged at more than 60 VDC or 25 VAC take all necessary precautions to protect against contact with the pins on the connectors single phase motors equipment with mains filter frequency inverter monitor etc Before switching on the power to this controller the user must be familiar with this manual and must follow the saf...

Страница 9: ...t and or installations if instructions are not followed Qualification of personnel Jobs described in this document may be carried out only by staff possessing the appropriate technical training and necessary experience or having been trained to this end by the product owner The manufacturer s responsibility is lifted and the guarantee voided if the owner or a third party fails to observe the instr...

Страница 10: ...ring the controller The controller can be stored in its original packaging at temperature of 20 C to 60 C Decontamination and product recycling In compliance with Directive 2002 96 CE concerning the handling of electrical and electronic equipment waste and Directive 2002 9 CE concerning restrictions on hazardous substances Adixen products that have reached the end of their service life must be ret...

Страница 11: ...on and avoids direct exposure to the sun Controller ventilation Internal components can deteriorate through overheating if there is inadequate ventilation DO not block the ventilation holes Electric shock hazard Before connecting the gauges set the power switch to the 0 off position Always connect the gauges before switching on power to the controller The supply voltage to the unit must be between...

Страница 12: ... Connect the vacuum gauge to the connection at the back of the controller 3 Connect the mains power cable 1 2 3 4 4 Set the power switch to the 1 ON position Products which are not properly connected to ground are a danger to life in the event of failure The controller frame must be connected to earth and an earth wire is provided for this purposes in the 3 pin power cable PE Always connect the po...

Страница 13: ...is available if The gauge is properly connected The pressure lies within the measuring range of the connected gauge Exponent Unit Measurement readout E g the AHC type gauge measures a pressure of 1 2 x 102 mbar Note From the measurement screen it s possible to identify what gauge is connected by pressing the button Enter 㪧㪩㪦㪞㪄㪈㪉㪊㪫㪜㪪㪫㪞㪘㪬㪞㪜㩷㪪㪧㩷㪈㩷㪉㪚㪦㪤㪤㪤㪜㪘㪪㪝㪠㪣㪛㪜㪞㪘㪪㪟㪭㪄㪛㪪㪙㪣 ...

Страница 14: ...llowing warning message comes up when no gauge is connected An error message is displayed when an error is detected at controller start up see Appendix 6 for the error message list Shutting down Switch off the ACS 2000 by setting the power switch to the O position or via the distribution box if rack mounted Before switching the ACS 2000 on again wait at least 10 seconds to allow it to reset ...

Страница 15: ...er s Manual Detailed contents B GB 03434 Edition Edition 03 October 09 1 5 Overview of the single channel controller 2 5 Controller concept Rear view of controller Control panel Description of display Navigation controls 5 5 Buttons ...

Страница 16: ... F Appendices Overview of the controller Controller concept The ACS 2000 provides power control and pressure display for the operation of a gauge It can be controlled by an operator via the front panel or externally by a computer via the built in RS232 link Technical and dimensional characteristics Appendices 1 and 2 ...

Страница 17: ...ontrol panel Display Settings and confirm parameters buttons Rear view of controller RS232 connector see Section E and Appendix 4 Power indicator light Power switch Power Connection Ground connection if required Connectors for gauges see appendix 4 The ACS 2000 is operated from the front face of the enclosure which includes touch buttons and a display Front face Rear face Remote connector see appe...

Страница 18: ... 㪞㪄㪈㪉㪊㪫㪜㪪㪫㪞㪘㪬㪞㪜㩷㪪㪧㩷㪈㩷㪉㪚㪦㪤㪤㪤㪜㪘㪪㪝㪠㪣㪛㪜㪞㪘㪪㪟㪭㪄㪛㪪㪙㪣㪱㪜㪩㪦㪞㪘㪪㪣㪦㪚㪢㪘㪣㪤㪭㫆㫃㫋㪫㫆㫉㫉㪧㪸㫄㪹㪸㫉 Unit Displayed with gauge type Program in progress Display of set point status Activated function s gauge or controller Measured pressure or No Gauge message if no gauge or Error message Errxx or Gauge type AP AP 2004 APN 2004 ACC ACC 2009 AHC AHC 2010 AD ASD 200X ARD 200X ...

Страница 19: ...ns are described below Refer to appendix 10 if you would like a detailed example of how to navigate Buttons 0 5 s Access to SETTING functions Back to previous menu up to DISPLAY screen 2 s On a SETTING screen Back to DISPLAY screen 3 s On the measurement screen Access to TEST MODE ENTER Validation button On the measurement screen display gauge type These buttons are used to navigate the menus sele...

Страница 20: ... Analog gauge output Specific settings AP 2004 APN 2004 Pirani gauges ACC 2009 Combined PIRANI Cold cathode gauge AHC 2010 Combined CRYSTAL Hot cathode gauge ASD 200X ARD 200X Capacitive gauges Set point management 9 14 Display Adjustment by gauge type General settings for the ACS 2000 10 14 RS232 parameters Locking the settings Settings for measurements Restoring factory default settings Availabl...

Страница 21: ...ons for the gauges prog 1 the controller prog 2 Access to settings On the measurement display screen press the button to bring up the following screen Use the button or to scroll to next screen Use the ENTER button to have access to the available parameters for the connected gauge 㪧㪩㪦㪞㪄㪈㪪㪧㩷㪈㩷㪉 Use the ENTER button to have access to the ACS 2000 controller parameters 㪧㪩㪦㪞㪄㪉㪪㪧㩷㪈㩷㪉 ...

Страница 22: ...UD Lock setting 5 PLOC Factory default settings 6 FACT RS232 adjustment 7 232C Prog1 Gauge settings Menu AP 2004 APN 2004 Pirani ACC 2009 Combined Pirani Cold Cathode AHC 2010 Combined Crystal Hot Cathode ASD 200X ARD 200X Capacitive gauge Set points 1 SP1 H 2 SP1 L 3 SP2 H 4 SP2 L Gas correction factor 5 GAS Degaz function 6 DEGS Off Set function 7 OFS Full scale 8 FSR Hot cathode deactivation fu...

Страница 23: ...cess SET PROG1 5 GAS 2 Press the ENTER button than set the needed value with the button or 3 Press ENTER button to confirm Analog gauge output A 0 10 V analog output is available on the Remote connector Its value is identical to the analog signal delivered by the gauge See the user manual supplied with the gauge for the voltage to pressure conversion functions and graphs See Appendix 4 Wiring up t...

Страница 24: ...auge indicates UR Under Range pressure below the gauge s measuring capabilities There are several possible causes of this UR indication the pressure really is low the cold cathode gauge is not primed the gauge is faulty ON setting Choose ON if you consider it abnormal for the gauge to have gone UR Previously activated set points will then be desactivated detection of UR status OFF setting Choose O...

Страница 25: ...he measuring screen ignore the displayed pressure values which will be wrong during this operation via the Remote connector DEGAS wiring see Appendix 4 Note degassing is impossible when degassing has just stopped after 3 minutes the pressure is greater than 5 x 10 3 mbar HV DSBL is active Factory default setting The DEGAS function is deactivated by default i e factory set to OFF Note if the DEGAS ...

Страница 26: ...activated by default and the display set to 4 digits Zero function Description This function allows you to assign a measured pressure value as a datum point The values displayed will then be negative when the pressure is less than the ZERO value entered Zero is displayed Activing the ZERO function Access SET PROG1 7 OFS Remark this is only possible in the voltage range of 0 2V to 0 2V delivered on...

Страница 27: ...ent screen Press on the button to move the decimal point on the left Press on the button to move the decimal point on the right Description This setting specifies the top value in the measuring range depending on the gauge used Adjusting this setting Access SET PROG1 8 FSR Press on the button or to modify the value Factory default setting The Full scale value is factory set to the highest possible...

Страница 28: ... pressure signal crosses the high threshold SP H SP L Open Open Closed Closed Time Set Point output Accessing set point adjustment Access SET PROG1 1 SP 1H SET PROG1 2 SP 1L Access SET PROG1 3 SP 2H SET PROG1 4 SP 2L Pressure adjustment range for set points and initial setting for each type of gauge Gauge Units max setting SP H SP L min setting Initial setting AP 2004 Pirani APN 2004 Pirani Pa 1 0...

Страница 29: ...on It is activated when the LOCK setting is ON Err05 will appear anytime anyone tries to modify a setting See appendix 6 error messages To unlock the settings set parameter lock to OFF RS232 setting Selecting the end of line characters for the RS232 transmission CR carriage return return to start of line only with a risk of overwriting the previous data CR LF carriage return line Feed advance to s...

Страница 30: ...00 controller to be restarted Factory default setting The pressure display is factory set to 2 digits This setting concerns all gauges except the capacitive gauge Description This setting lets you choose between the following units for displaying pressure mbar Torr Pascal The pressure units are shown in the bottom right of the screen Accessing this setting Access SET PROG2 3 UNIT Changing this set...

Страница 31: ...le processes or fluctuating measurement signals Normal filter Choose the standard setting to obtain a good compromise between a fast signal response and a noisy signal on both the display and the set point functions Slow filter Choose slow to remove noise from the displayed signal and to eliminate premature tripping of set points caused by signal noise The controller will then respond more slowly ...

Страница 32: ...appendix 5 Available Remote Inputs Output Analog recording output A 0 10 V non configurable analog output is available at the Remote connector pins 2 3 Its value is independent of the type of gauge connected to the channel The signal can be used by applying the following formula output V 1 2 Log Pdisp 12 or Pdisp 10 2 x output voltage V 12 Pdisp value of displayed pressure See Appendix 4 for wirin...

Страница 33: ...emote connector The criteria controlled depend on the gauge type Table of remote control functions Gauge Gauge input function1 Gauge input function2 Pirani AP 2004 APN 2004 not used not used CRYSTAL hot cathode AHC2010 DSBL DEGAS Cold cathode Pirani ACC2009 not used not used Capacitive ASD200X ARD200X no used not used Available Remote Inputs Outputs continued Remote control See Appendix 4 for wiri...

Страница 34: ... version checking 2 6 Analog Digital converter test 3 6 Gauge input voltage Gauge identification resistance Controller display test 4 6 Memory test 4 6 EEPROM test Controller interface tests 5 6 Verification of recorder output voltage Input output relay switching test Testing the front panel buttons Testing the RS232 link ...

Страница 35: ... Use the buttons to select which test to perform and press the ENTER button to confirm your choice see navigation method Access to test mode 㪫㪜㪪㪫㪧㪩㪦㪞㪪㪧㪈㪉 Description This test allows to check the built in software version Accessing the menu Access SET 1 PNO Press ENTER button to confirm The controller display the software version P R O G 123 TEST G AU G E SP 1 2 C O M M Single channel controll...

Страница 36: ...lays the input voltage for the connected gauge Leaving this menu Press the button to get back to the previous screen Gauge input voltage Gauge identification resistance Description Use this test to check the identification resistance from the gauge Accessing the menu Access SET 2 ADC 1 Press ENTER button to confirm The controller displays the value of the identification resistance This value depen...

Страница 37: ...this test Access SET 4 Display Press ENTER button to confirm Leaving this test Press the button to get back to the previous screen Memory test Description Use this test to check Program memory EEPROM Accessing this test Access SET 5 EEP Press ENTER to confirm The program starts up automatically PASS is displayed to indicated the test has been passed Err is displayed to indicate the test has failed...

Страница 38: ...ax value Use the buttons to select a different output voltage 10V to 0 1V Check that the measured voltage is the same as that displayed on the controller Leaving this test Press to get back to the previous screen Verification of recorder output voltage The relays can be switched manually independently of the pressure It is therefore a good idea to disconnect the cable attached to the Remote connec...

Страница 39: ...the screen Ex Screen display UP Leaving this test To leave this test and get back to the previous screen press and hold down the button Testing the RS232 link Use this test to check the data transfer to and from a computer Accessing this test Access SET 9 232C Press ENTER button to confirm This screen displays COMM while data being transmitted from the computer to the controller The transmitted ch...

Страница 40: ...r s Manual Detailed contents E Introduction 2 7 RS232 interface Location of the RS232 interface Configuring the RS232 protocol Symbols used Transmission syntax List of commands 3 7 Interpreting replies List of commands Detailed description of RS232 commands 4 7 ...

Страница 41: ... Configuration of RS232 protocol See the General settings for the ACS 2000 controller paragraph in the Configuration chapter Data is transmitted in the following format 9600 bauds 8 data bits 1 stop bit no parity bit Transmission syntax The order The transmission syntax is as follows End of message characters CR Carriage Return Control characters Start of text always Used when parameters are requi...

Страница 42: ...Set confirmation of power cut Controller DGS Request degassing function for AHC gauges AHC DGT Set number of digits displayed Channel ERR Status of current errors Controller FDS Disable filament of AHC gauges AHC FLT Set filtering Channel FSR Set full scale for AD gauges Channel GAS Adjust gas correction factor Channel LOC Lock settings Controller OFS Request zero function for AD gauges Channel PR...

Страница 43: ...value a reception interval 0 100 ms 1 1s 2 1min b status of gauge 0 OK 1 Ur 2 Or 3 Err 03 or Err 04 4 not used 5 No Gauge 6 Id Err 7 Err Hi or Err Lo or Err 06 or Err 07 c measured pressure value for gauges AP ACC AHC x xxE xx for gauge AD x xxxxE xx no gauge 0 00E 00 Press any button to stop transmission CPF CPF a Set confirmation of power cut a memorise power supply problem 0 OFF 1 ON CPF a OK D...

Страница 44: ...a Disable AHC filament a status of disable function 0 OFF not disabled 1 ON disabled FDS a OK FLT FLT a Set filtering a filter 0 SLOW 1 NORMAL 2 FAST FLT a OK FSR FSR a Set full scale for AD gauges a full scale for AD gauge 0 1333 mbar 1 133 3 mbar 2 13 33 mbar 3 not used 4 1 333 mbar 5 not used 6 0 333 mbar 7 not used 8 0 133 mbar FSR a OK GAS GAS a Adjust gas correction factor a adjustment of va...

Страница 45: ... 0 00E 00 SP1 SP1 a b Adjust set point SP1 a set point low threshold SP1L b set point high threshold SP1H x xxE xx SP1H SP1L SP1 a bc OK SP2 SP2 b c Adjust set point SP2 a set point low threshold SP2L B set point high threshold SP2H x xxE xx SP2H SP2L SP2 a b OK SPS SPS a b Query set points status a status of set point SP1 c status of set point SP2 0 OFF 1 ON TAD TAD a b Test Analogique Digital co...

Страница 46: ...cted AP ACC AHC AD or NoGau TIO TIO a OK Test set point relays a state of set point relays 0 initial state 1 set points and 2 OFF 2 set points and 2 ON TIO a b OK TKY TKY a Test panel buttons a status of command buttons x SET button x ENTER button x button x v button 0 for OFF 1 for ON TRS TRS OK Test RS232 link End of test when ETX Ctrl C is transmitted UNI UNI a Set pressure measurement units a ...

Страница 47: ...endix 2 Dimensions 4 15 Appendix 3 Rack Installation 5 15 Appendix 4 Cable and connector details 6 15 Appendix 5 Factory settings 9 15 Appendix 6 Error messages 10 15 Appendix 7 Accessories 12 15 Appendix 8 Conversion of measuring units 13 15 Appendix 9 Declaration of conformity 14 15 Appendix 10 Detailed example of navigation 15 15 ...

Страница 48: ...0 Pirani Cold cathode ACC2009 Capacitive ASD200X ARD200X Sockets Gauges D Sub 9P female Remote D Sub 15P female RS232 D Sub 9P male Commands Front panel buttons 4 buttons Rear panel connectors see Overview of multi channel controller paragraph in this manual Display Screen LCD Refresh time 100 ms Measurement Measuring range specific to gauge Measurement error amplifier 0 02 FS offset 0 05 FS Filte...

Страница 49: ...ice life 1 x 105 cycles de commutation à charge maxi Remote control input Number 2 on REMOTE connector Photocoupler input 24 V DC Analog output Number 1 on REMOTE connector Voltage range 0 5 10 5 V Accuracy 50 mV difference from displayed value Impedance 200 Ω Recording output Number 1 on REMOTE connector Voltage range 0 10 V Precision 20 mV Impedance 200 Ω Interface RS232 Standard RS232 RS232 con...

Страница 50: ...oduct description C Settings D Test mode E RS232 mode F Appendices Appendix 2 Dimensions Front panel thickness 2 5 mm 103 mm 4 05 inch 106 3 mm 4 18 inch 91 4 mm 3 59 inch 212 mm 8 34 inch 4 x Ø 3 5 mm diam 0 137 inch 84 mm 3 3 inch 67 5 mm dia m 2 6 5 inch ...

Страница 51: ...d In this case we recommend to use a panel mounted circuit breaker If the controller is rack mounted the controller temperature will rise and this could cause damage To avoid this leave 20mm free space around the controller In addition a fan must be installed in the rack to avoid the ambient temperature rising above 50 C 105 mm 4 13 inch 91 4 mm 3 59 inch 78 mm 3 07 inch 4 M3 holes Ø 0 137 inch 69...

Страница 52: ...ription 1 Measured signal input Analog signal 0 10 V delivered by the gauge 2 Not used Not used 3 Gauge function output DSBL function for AHC2010 gauge 4 Power supply output 24V DC for power supply to gauge 5 Identification input Gauge function 2 output Gauge identification see table below DEGAS func tion for AHC2010 gauge 6 Not used Not used 7 Not used Not used 8 Measured signal input Analog sign...

Страница 53: ...point NO Set point dry contact 7 Set point common 8 Set point NC 9 24 V DC power supply output 24 VDC power supply max 100 mA 10 24 V DC power supply output 11 Input function 2 gauge 24 VDC to activate the control 0 V to deactivate the control 12 Input function 2 gauge 13 Set point 2 NO Set point 2 dry contact 14 Set point 2 common 15 Set point 2 NC NO Normally open NC Normally closed Before conne...

Страница 54: ... connector D sub9P Male D sub9P Female D sub9P to PC ACS2000 RS232 cable Pin No Signal name Description 2 RXD Data reception 3 TXD Data transmission 5 GND Chassis earth If the pin number is not described it is because it is not used The RS232 specifications are described in chapter E RS232 Mode In compliance with electromagnetic compatibility standards use shielded cables for connecting the interf...

Страница 55: ...can be restored at any time You can use the User value column to note your own specific settings Setting Default value User value Under Range control OFF Gas setting 1 Filter setting NORM Full scale setting 1333 mbar Digit setting 2 digit Unit setting mbar Baud rate setting 9600 bps Parameter lock setting OFF RS232 setting CR Set Point see Settings by gauge type table Chapter C Appendix 5 Factory ...

Страница 56: ... stopped Channel control board 1 Switch controller off then switch on 2 Contact customer Service for repair Err 05 display 2 seconds Modification of a parameter PLOC function ON running Deactivate the function PLOC OFF E Err 06 Gauge fault Eprom or converter A D Measurement stopped Gauge error See Gauges Fault catalog F Err 07 AHC gauge fault Filament B A or electronic Measurement stopped Gauge er...

Страница 57: ...isplay Definition Possible fault Action G Err Lo Gauge fault signal 0 10V too low Measurement stopped Gauge error See Gauges Fault catalog Err Id Identification error of the gauge The gauge is not recognized Check the gauge Check the cable No GAUGE No gauge connected No gauge connected Check the gauge Check the cable Appendix 6 Error messages Led ON Led OFF ...

Страница 58: ...surement is not correct gauge not zeroed or zero drift or contamination ASD ARD red pressure over the full scale range or temperature out range 1 AP APN ACC AHC check sensor head AHC start degas 2 replace sensor head ASD ARD green zéro adjustment ASD ARD red none C green 2 199 V 8 582 V green 1 8 V 8 645 V or green 0 774 V 10 061 V green or red 0 2 V 10 5 AP APN ACC et AHC 1 2 2 ASD ARD 09677 20 6...

Страница 59: ...nd cables Item Description P N 1a mains cable Europe 2m 103566 1b mains cable US Japan 2m 103567 1c mains cable UK 2m 104411 1d mains cable Switzerland 2m 103718 1e mains cable Italy 2 m 104758 Gauge cables Adapter kit series 1000 series 2000 measuring range Length P N 5 m 112752 10 m 112753 20 m 112754 Description P N Gauge adapter 113152 Controller adapter 113153 13 16 ...

Страница 60: ... 0 987x10 3 Torr 133 322 1 333x10 3 1 333 1 1 316x10 3 at 101 325x103 1 013 1 013x103 760 1 Pressure mbar Pascal Torr mmH2O psi mbar 1 100 750 062x10 3 10 2 14 504x10 3 Pascal 10x10 3 1 7 5x10 3 0 102 0 145x10 3 Torr 1 333 133 322 1 13 595 19 337x10 3 mmH2O 9 81x10 2 9 81 7 356x10 2 1 1 422x10 3 psi 68 948 6 895x103 51 715 703 1 Vacuum technique pressure units mm m inch ft mm 1 10 3 39 37x10 3 3 2...

Страница 61: ...GB 03438 Edition 03 October 09 15 16 A Commissioning B Product description C Settings D Test mode E RS232 mode F Appendices Appendix 9 Declaration of conformity ...

Страница 62: ...㪬㪞㪜㩷㪪㪧㩷㪈㩷㪉㪚㪦㪤㪤㫄㪹㪸㫉 3 ENTRER 㪧㪩㪦㪞㪄㪈㪪㪧㪈㪉 2 ENTRER 㪧㪩㪦㪞㪄㪈㪪㪧㩷㪈㩷㪉 1 ENTRER 㪧㪩㪦㪞㪄㪈㪉㪊㪫㪜㪪㪫㪞㪘㪬㪞㪜㩷㪪㪧㩷㪈㩷㪉㪚㪦㪤㪤㫄㪹㪸㫉 Change to settings mode Program choice 1 and confirm 2 Function choice 1 and confirm 2 Change value of setting 1 and confirm 2 Leave function Leave program Back to initial screen Appendix 10 Detailed example of navigation Adjusting a set point 2 1 1 2 1 ...

Страница 63: ...pan Tel 81 3 6431 7130 Fax 81 45 544 0049 KOREA Alcatel Vacuum Technology Korea 315 2 Banwol dong Hawsung si 445 330 Kyungki do South Korea Tel 82 031 206 6277 Fax 82 031 204 6279 NETHERLANDS ALCATEL Vacuum Technology Benelux Landzichtweg 60 NL 4105 DP Culemborg The Netherlands Tel 31 345 478 400 Fax 31 345 531 076 SINGAPORE Alcatel Lucent Singapore 49 Jalan Pemimpin 01 02 APS Industrial Building ...

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