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Laser position accuracy on the image plane is ± 25ìm average error over each image plane. The
laser position resolution on each image plane is 10ìm or greater. The scanners generate a beam
speed on each image plane ranging from 0 mm/sec up to 5000 mm/sec, while positioning the
beam at ±25 ìm accuracy. It is capable of speeds up to 15,000 mm/sec at at ±100 ìm accuracy.
The IPM also provides real-time spot size correction. While drawing the working beam, the
machine can adjust the diameter setting, within 1msec, on either image plane to the beam
diameter.
The power monitoring of the IPM includes a fast detector, capable of 1ìs resolution, and a slow
detector, which is accurate to 1%. The IPM can control optical beam power on each image plane
to ±5% of the commanded value. It also provides ellipticity between (xx: what are the units here?
) 0.9 and 1.1 on each image plane. Sensors that can detect and measure beam properties, or
profilers, are on the process frame. These sensors monitor beam diameter, ellipticity, and power,
and actively calibrate each scanner’s pointing, in order to compensate for position drift. The
pointing drift monitoring capability is 10ìRad resolution, once per minute; the exposure accuracy
is ±5%. The IPM is assembled as a module without requiring additional alignment or adjustments.
Laser System
The laser system consists of the following three functional sub-systems--the laser head,
the controller and power supply, and the laser head cooling. Total power consumption is
less than 800W; the warranty for the three components is 5000 hours.
Laser System Power Supply
In the Viper Pro, the laser power supply is located in the power distribution cabinet; it can
be accessed through the rear control module access panel.
Содержание Viper Pro SLA iPro 8000
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