SEM Quick Start
Revision No.2
May 2014
Page 5 of 16
1.2
Instrument Startup
This section chronologically outlines the steps required to properly start up
the instrument safely.
1.2.1
Software Startup
The microscope is controlled entirely by the
SmartSEM
software
suite developed by Zeiss. The software requires users to login to an
account before use. User accounts are important for both logging operator
actions as well as saving personalized user interface preferences. Once
opened and logged in, the software will automatically show a view of the
vacuum chamber as well as the status of the instrument. The operator is
encouraged to become familiar with the layout of the user interface prior
to preforming any work with the instrument. The help system built into the
SmartSEM
software suite has been found to be an effective resource in this
arena.
1.2.2
Gas Pressure and Vacuum Control
This microscope uses pressurized gases for both vacuum chamber
valve actuation and variable pressure viewing modes. Prior to pulling a
vacuum, the operator must ensure that the instrument is being supplied
with compressed air at a pressure of
87 psi (116 psi, maximum)
. If the
operator intends to view samples under variable pressure mode (which
will not be discussed in this guide), the instrument must also be supplied
with nitrogen gas at a pressure of
2.9 psi (4.4 psi, maximum)
.
Assuming the sample has been properly prepared and loaded
(Section 1.1), the operator must ensure that both the vacuum chamber door
is completely closed, and that the instrument is being supplied with
pressurized gas before pumping down the chamber. Find the
Vac
status
box at the bottom right section of the
SmartSEM
interface and select
Pump
. At this point the roughing pump will switch on and begin pulling a
vacuum. Shortly thereafter, the turbo molecular pump can be heard
spinning up once the roughing pump has pulled the chamber to an
appropriate pressure.
