SEM Quick Start
Revision No.2
May 2014
Page 7 of 16
values. Compare these images with one another and make a mental note of
their differences.
1.3
Producing an Image
Note: This section assumes that the operator is working in SEM mode only and
that no STEM stage or detector will be used. The operator is encouraged to begin
their journey with the microscope in SEM mode since it is somewhat simpler and
less hazardous then STEM mode. Please refer to section 1.4 for instructions
specific to STEM imaging.
This section briefly outlines the steps required to produce a focused image
of the sample in the main viewing window. Many of the procedures listed in this
section will make use of both the
Zeiss SEM
keyboard and the
SEM Stage Control
board. The adjustments made using these input boards can be performed in either
coarse or fine modes. To cycle between the two modes simply toggle the textbox
at the bottom right of the screen that reads either
Fine
or
Coarse
, depending on
the currently selected adjustment mode.
1.3.1
Detectors
The instrument comes equipped with a variety of detectors that suit
different situations. For the purposes of this guide, only the TV, SE2, and
STEM detectors will be covered. The data coming from the detectors are
viewed in the main viewing window at the center of the
SmartSEM
program screen. At the bottom of this window can be found the currently
selected detector channel, it is listed as
Signal A
. Switching detector
channels can be done in a number of ways, with the simplest being via the
Camera
button on the
Zeiss SEM
keyboard.
The detector shown at startup by default is the TV detector. This
channel simply shows a view of the vacuum chamber, as seen from the
orifice. It is critical that the operator use this channel when making gross
adjustments to the position of the sample stage (Section 1.3.2). The SE2
detector is responsible for viewing electrons generated through ionization
of the sample. The electrons, called secondary electrons, are collected at a
detector at an angle to the primary electron beam and are excellent at
showing the topography, or surface characteristics, of a sample. The final
