SEM Quick Start
Revision No.2
May 2014
Page 2 of 16
TABLE OF CONTENTS
Section
Page
1.0
Procedural Section ............................................................................................................................................ 3
1.1
Sample Preparation and Loading ............................................................................................................. 3
1.1.1
Support Selection ................................................................................................................ 3
1.1.2
Sample Deposition .............................................................................................................. 3
1.1.2.1
Liquid Samples ..................................................................................................... 3
1.1.2.2
Solid Samples ....................................................................................................... 4
1.1.3
Loading the Carousel .......................................................................................................... 4
1.2
Instrument Startup .................................................................................................................................... 5
1.2.1
Software Startup ................................................................................................................. 5
1.2.2
Gas Pressure and Vacuum Control ..................................................................................... 5
1.2.3
Accelerating Voltage .......................................................................................................... 6
1.3
Producing an Image .................................................................................................................................. 7
1.3.1
Detectors ............................................................................................................................. 7
1.3.2
Stage Control and Working Distance using Analog Controls............................................. 8
1.3.3
Stage Control Using SmartSEM’s Stage Navigation .......................................................... 9
1.3.4
Scan Speed and Noise Reduction ..................................................................................... 10
1.3.5
Reduced Raster ................................................................................................................. 10
1.3.6
Brightness and Contrast .................................................................................................... 11
1.3.7
Magnification and Focus .................................................................................................. 11
1.3.8
Stigmation and Focus Wobbles ........................................................................................ 11
1.3.9
Saving an Image ............................................................................................................... 12
1.4
STEM Mode ........................................................................................................................................... 13
1.4.1
Stage Navigation and the STEM Detector ........................................................................ 13
1.4.2
Imaging Modes ................................................................................................................. 14
1.5
Logging Off ............................................................................................................................................ 15
1.5.1
Stage Positioning and STEM Detector ............................................................................. 15
1.5.2
Accelerating Voltage ........................................................................................................ 15
1.5.3
Vacuum Control and Gas Pressure ................................................................................... 16
1.5.4
Closing the Software ......................................................................................................... 16
2.0
References ...................................................................................................................................................... 16
