Zeiss Focal CC, Instruction Manual

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ZEISS 5 First Operating Steps | 5.5 Selecting Focal CC in the Software
5.5 Selecting Focal CC in the Software
Info
Focal CC must be turned off when pumping the specimen chamber to vacuum.
Info
When Focal CC is selected in the software, quiet vacuum mode is not available.
Fig. 7: The Charge Compensation section looks slightly different for GeminiSEM (left) and Sigma
(right)
Prerequisite
ü
The Focal CC is installed on your system, refer to Installation [
}
16] .
ü SmartSEM V06.03 or higher is installed on your system.
ü
The specimen chamber is at high vacuum with the column valve opened.
Procedure 1. In the View menu of SmartSEM, select SEM
Status .
Instruction Manual ZEISS Focal CC | en-US | Rev. 2 | 349561-8021-000 19