Zeiss EVO, Instruction Manual

Page: 176 / 180

Index ZEISS
Index
A
Acceleration voltage 27
Accessory 172
Air Conditioning and Quality 154, 159, 164
Alignment
Aperture 80
Gun 79
Analysis mode 29
Aperture 23, 27, 113
Automated function
Auto aperture alignment 80
Auto gun alignment 79
B
Backscattered electron 31, 43
Bakeout 120
Baking out the gun head 120
Beam deceleration 88
BSD detector 43, 85
BSE 43
C
C2D detector 42, 83
C2DX detector 85
Cathodoluminescence 31, 46
CCD camera 37
Chamber door seal 117
Chamberscope 37
Checking
Position of the circuit breaker 147
Temperature 117
Chemical 113
Circuit breaker 147
CL detector 46
Comissioning 56
Compressed Air Supply 156, 161, 167
Consumable 113, 171
Consumable and chemical 113
Contamination 151
Control panel 48
Cover panel, protective 18
D
Decontamination 151
Depth mode 29
Detection System 158, 163, 169
Detector 32, 82
BSD 43, 85
C2D 42, 83
C2DX 85
CL 46
Everhart-Thornley 33
SE 33, 83
STEM 45
VPSE 39
YAG BSD 44, 87
Differential pumping aperture 23
Disposal 148, 151
DPA 23
Dual joystick 47
E
EasyVP mode 23
EHT 27
Electron optical column 27
Electron Optics 156, 162, 167
Emergency shutdown 111
Emitter life 113
Environmental Requirements 156, 161, 167
EP mode
23, 26
Everhart-Thornley detector 33
EVO column 27
Exhaust Line 155, 161, 166
Extended pressure mode 23, 26
F
Faraday cup 81
Field mode 29
Filament 27, 122
Fisheye mode 29
Focus wobble 76
G
General Safety Information 10
GUI 50
Gun head, bakeout 120
H
Hazard
Electrical hazard 11
Generated by materials and substances 12
Generated by radiation
13
Mechanical hazard 11
Radiation hazard 13
Thermal hazard 13
Hazards 11
Prevention 11
HD BSD 43
176 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006