Zeiss EVO, Instruction Manual

Page: 167 / 180

ZEISS 9 Technical Data and Conformity | 9.5 Performance Data and Specifications | EVO 25
Parameter Requirement
Flow rate Approx. 3 l/min for ventilation of specimen chamber with chamber
door open
Pressure 0.2–3.3 bar
Quality 4.6 with nitrogen content > 99.996 %
Connection hose 4 mm inside diameter. 10 m are delivered with the microscope.
Instrument con-
nection Quick exchange connector. One is delivered with the microscope.
Compressed Air
Supply
Compressed air is used to operate several valves and the auto leveling system. The necessary com-
pressed air can be either generated by a compressor (part no. 345596-0000-000) or taken from a
gas cylinder or from an in-house supply system.
Environmental
Requirements
Parameter Requirement
Electrical field The microscope is a class A device (industrial). The microscope is de-
signed to operate in a controlled electromagnetic environment. This
means that devices with RF transmitters such as mobile phones or
DECT phones must not be used in close proximity.
Vibrations Less than 6 μm/sec rms from 0–30 Hz
Less than 12 μm/sec rms above 30 Hz
Magnetic stray
fields Max. 3 × 10⁻⁷ T (peak to peak) = 3 mG (peak to peak)
Acoustic noise Less than 53 dB for frequencies up to 200 Hz
Less than 42 dB for frequencies from 200 up to 300 Hz
Less than 50 dB for frequencies higher than 300 Hz
Electron Optics
Parameter Description
SEM resolution EVO column at optimum working distance:
SE detector, W or LaB₆ filament:
§
3 nm at 30 kV with W
2 nm at 30 kV with LaB₆
§ 3.4 nm at 30 kV, VP mode
§
20 nm at 1 kV with W
15 nm at 1 kV with LaB₆
§
8 nm at 3 kV
HDBSD detector and beam deceleration, W or LaB₆ filament
§ 6 nm at 3 kV
Magnification Range: <7x – 1,000,000x referenced to Polaroid 5" × 4.5" image for-
mat
Electron source Filament: W or LaB₆
Field of View
§
Maximum 6 mm diameter
at the analytical working distance (AWD) of 8.5 mm
§
Maximum 45 mm diameter
at the longest working distance
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006 167