ZEISS
9 Technical Data and Conformity | 9.5 Performance Data and Specifications | EVO 25
Parameter
Requirement
Flow rate
Approx. 3 l/min for ventilation of specimen chamber with chamber
door open
Pressure
0.2–3.3 bar
Quality
4.6 with nitrogen content > 99.996 %
Connection hose
4 mm inside diameter. 10 m are delivered with the microscope.
Instrument con-
nection
Quick exchange connector. One is delivered with the microscope.
Compressed Air
Supply
Compressed air is used to operate several valves and the auto leveling system. The necessary com-
pressed air can be either generated by a compressor (part no. 345596-0000-000) or taken from a
gas cylinder or from an in-house supply system.
Environmental
Requirements
Parameter
Requirement
Electrical field
The microscope is a class A device (industrial). The microscope is de-
signed to operate in a controlled electromagnetic environment. This
means that devices with RF transmitters such as mobile phones or
DECT phones must not be used in close proximity.
Vibrations
Less than 6 μm/sec rms from 0–30 Hz
Less than 12 μm/sec rms above 30 Hz
Magnetic stray
fields
Max. 3 × 10⁻⁷ T (peak to peak) = 3 mG (peak to peak)
Acoustic noise
Less than 53 dB for frequencies up to 200 Hz
Less than 42 dB for frequencies from 200 up to 300 Hz
Less than 50 dB for frequencies higher than 300 Hz
Electron Optics
Parameter
Description
SEM resolution
EVO column at optimum working distance:
SE detector, W or LaB₆ filament:
§
3 nm at 30 kV with W
§
3.4 nm at 30 kV, VP mode
§
20 nm at 1 kV with W
§
8 nm at 3 kV
HDBSD detector and beam deceleration, W or LaB₆ filament
§
6 nm at 3 kV
Magnification
Range:
<7x – 1,000,000x referenced to Polaroid 5" × 4.5" image for-
mat
Electron source
Filament:
W or LaB₆
Field of View
§
Maximum 6 mm diameter
at the analytical working distance (AWD) of 8.5 mm
§
Maximum 45 mm diameter
at the longest working distance
Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
167
Summary of Contents for EVO
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