Zeiss EVO, Instruction Manual

Page: 158 / 180

9 Technical Data and Conformity | 9.3 Performance Data and Specifications | EVO 10 ZEISS
Parameter Description
Specimen current monitor with integrated Touch Alarm (audible
touch alarm warning with on-screen message)
Specimen mounts: One 9x specimen holder for 13 mm diameter
stubs included in base tool configuration, various specimen holders
available as option
Vacuum range Vacuum modes
§
HV mode: lower than 2 mPa (2 × 10⁻⁵ mbar)
§ VP mode (optional): 10–400 Pa
§
EasyVP mode (optional): 10–133 Pa
§
EP mode (optional): 10–3000 Pa
Detection System
Parameter Description
Chamber detectors SE detector:
Everhart-Thornley SE detector with optically coupled photomultiplier;
collector bias adjustable from −250 to +400 V
VPSE detector (optional) (only for VP mode):
Fourth generation variable pressure secondary electron detector for
imaging in VP mode with up to 85 % improvement in Weber contrast
ratio
C2D detector (optional) (only for VP mode):
Cascade Current Detector with floating amplifier electronics, for en-
hanced imaging in Variable Pressure mode up to 133 Pa. Delivers de-
tail at low kV for specimens that demand higher pressures, e.g. poly-
mers, bio specimens, pharmaceuticals, powders, and fibers. Enhanced
signal-to-noise ratio versus VPSE detector.
C2DX (optional) (only for VP mode):
Extended Cascade Current Detector
HDBSD detector (optional):
BSE imaging at low kV of metals, polymers, minerals, etc. both in HV
and VP modes.
YAG BSD detector (optional):
Robust, fully retractable, YAG-crystal-based BSE scintillator detector
with rise time ~200 ns. Easy to use with no amplifier gain adjustment
required.
STEM detector (optional):
Scanning Transmission Electron Microscopy (STEM) detector, with pre-
aligned specimen holder and Bright-field (BF) STEM detector
CL detector (optional):
Cathodoluminiscence (CL) chamber detector (option for non-VP con-
figurations, included in VP option)
SCD (optional)
Specimen current detector
For more details refer to the document Product Specification.
158 Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006