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1. About this manual
This instruction manual is considered to be part of the Argon Ion Beam System.
Read the instructions carefully. Keep the instruction manual nearby the Argon Ion Beam System
and hand it over to future owners of the instrument.
This instruction manual is designed for users who have been trained by an authorised
Carl Zeiss expert to operate the workstation, the Argon Ion Beam System
=
is built in.
Operators of the must not deviate from the instructions provided in this document.
IMPORTANT
It is assumed that the operator is already familiar with general functions of SmartSEM
®
and the operation of the CrossBeam
®
workstation.
Reference to
related
documents
For detailed information regarding the CrossBeam
®
workstation refer to the Instruction Manual of
the workstation.
For detailed information regarding the operating software refer to the Software Manual
SmartSEM
®
NV.
Safety
instructions
The safety instructions in this manual are classified as follows:
DANGER
This safety symbol and signal word indicates an imminently hazardous situation.
Disregarding this warning WILL result in death or serious injury.
WARNING
This safety symbol and signal word indicates a potentially hazardous situation.
Disregarding this warning COULD result in death or serious injury.
CAUTION
This safety symbol and signal word indicates a potentially hazardous situation.
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous situation.
Disregarding this warning MAY result in property damage.
Summary of Contents for Argon Ion Beam System
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