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6. Maintenance and repair
6.1. Change of consumables and chemicals
6.1.1. Replacing the argon supply
After a certain time of operation, the argon supply will be used up.
In this case, contact the local Carl Zeiss service engineer to hace the argon gas bottle
replaced.
6.2. Repair
CAUTION
Risk of property damage due to improper maintenance, service or repair.
The warranty might be voided.
Strictly follow the instructions given in this instruction manual.
The Argon Ion Beam System is not user-serviceable.
In case of a defect, contact your local Carl Zeiss service engineer for assistance.
The Argon Ion Beam System can be repaired by authorised Carl Zeiss service staff only.
Summary of Contents for Argon Ion Beam System
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