Zeiss Argon Ion Beam System, Instruction Manual

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10. Index
A
Abbreviations 29
Acceleration voltage 12
,
18
Amorphous surface layer 11
Argon discharge 20
Argon imaging 21
Azimuthal angle 21
C
Change of consumables 27
Checking the coincidence point 27
Conformity 30
Customer service 13
D
Declaration 30
Declaration of conformity 30
Definition of terms 7
De-installation and disposal 28
F
Faraday cup 16
,
19
FIB mode Argon 9
FIB mode Argon + SEM 9
Fine polishing of TEM samples 21
G
Gallium implanted surface layer 11
I
Installation 13
Instruction 5
Intended use 8
M
Maintenance 27
Maintenance and repair 27
O
Operation 14
Operator 7
Operator, basic 7
Operator, specially trained 7
P
Polar angle 21
Prevention of accidents 8
Principle of operation 10
R
Repair 27
S
Safety instructions 5
Safety summary 8
SmartSEM® 7
Software Manual SmartSEM® 14
Switching off 18
Switching on 14
T
Technical data 12
TEM lamella 7
,
8
,
11
,
21
Triple beam system 8
Troubleshooting 28
U
User 7