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6.3. Troubleshooting
The following table summarises some clues to solve problems.
If you cannot solve the problem or if you feel unsure do not hesitate to get in contact with your
local Carl Zeiss service engineer.
DANGER
Danger to life: Hazardous voltage inside the workstation.
Only service engineers trained and authorised by Carl Zeiss are allowed to service the Ar-
gon Ion Beam System and the workstation and to perform work on the electrical system.
7. De-installation and disposal
The Argon Ion Beam System is de-installed and disposed of by authorised Carl Zeiss
service staff only.
Keyword
Symptom
Possible reason
Recommended action
Argon beam
It takes long until an image is
visible
Argon gas flow is not adjusted
correctly
Increase argon gas flow to
1.5
-
3.0
%
No image
Argon gas flow is too low/high
Argon gas bottle is empty
Adjust argon gas flow to
1.5
-
3.0
%
Contact the Carl Zeiss Service
Beam does not switch on
Argon Ion Beam System is
contaminated
Contact the Carl Zeiss Service
Summary of Contents for Argon Ion Beam System
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