Zeiss Argon Ion Beam System, Instruction Manual

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Table of contents
1. About this manual ........................................................................................ 5
1.1. Definition of terms ........................................................................................... 7
2. Safety summary ........................................................................................... 8
2.1. Intended use ..................................................................................................... 8
2.2. Prevention of accidents and of improper use ............................................... 8
3. Description ................................................................................................... 9
3.1. Overview ........................................................................................................... 9
3.1.1. Argon FIB modes .................................................................................................... 9
3.2. Principle of operation .................................................................................... 10
3.2.1. Fine-polishing ........................................................................................................ 11
3.3. Technical data ................................................................................................ 12
3.4. Customer service ........................................................................................... 13
4. Installation .................................................................................................. 13
5. Operation .................................................................................................... 14
5.1. Getting started ................................................................................................ 14
5.1.1. Switching on the argon beam ................................................................................ 14
5.1.2. Adjusting the coincidence point ............................................................................. 16
5.2. Adjusting operational parameters ................................................................ 18
5.2.1. Setting the acceleration voltage ............................................................................ 18
5.2.2. Checking the argon gas flow ................................................................................. 19
5.2.3. Checking the argon discharge ............................................................................... 20
5.3. Fine polishing of TEM lamellas ..................................................................... 21
5.4. Switching off the argon beam ....................................................................... 26
6. Maintenance and repair ............................................................................. 27
6.1. Change of consumables and chemicals ...................................................... 27
6.1.1. Replacing the argon supply ................................................................................... 27
6.2. Repair .............................................................................................................. 27
6.3. Troubleshooting ............................................................................................. 28
7. De-installation and disposal ..................................................................... 28
8. Abbreviations ............................................................................................. 29
9. Declaration of conformity .......................................................................... 30
10. Index .......................................................................................................... 31