Varian TriScroll 300 Series Maintenance Manual Download Page 96 | Manualshive

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TriScroll 300 Dry Scroll Vacuum Pump

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Put the Pump Back into Service

The TriScroll 300 pump can be placed into service immediately after maintenance is complete.
However, 24 hours of run time is required before base pressure of 10 mTorr can be achieved.

3. Install the cowling over the pump module.

4. Secure it with the three M5x16 screws.

This figure illustrates a fully reassembled
TriScroll 300 pump.

NOTE

The 24 hour run time does not have to
be continuous. If your application
requires a low base pressure, it is wise
to run the pump for the 24-hour period
for optimum performance.

Final Assembly (continued)

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Summary of Contents for TriScroll 300 Series

Page 1: ...D R A F T 4 2 9 0 4 vacuum technologies TriScrollTM 300 Series Dry Scroll Vacuum Pump Manual No 699904260 Revision H May 2004 MAJOR MAINTENANCE MANUAL ...

Page 2: ...ogies TriScroll 300 Series Dry Scroll Vacuum Pump TriScroll is a trademark of Vacuum Technologies Loctite and PST are registered trademarks of Loctite Corporation Krytox Teflon and Viton are registered trademarks of E I du Pont de Nemours and Company ...

Page 3: ...ft Exploded View 31 Assemble the Crankshaft 32 Inboard Housing Assembly 35 Inboard Housing Exploded View 35 Inboard Housing Assembly 38 Insert the Shaft Seal 38 Insert the Crankshaft 40 Insert the Seal Housing 42 Install the Vents and Plugs 45 Exhaust Port Reassembly 47 Bypass Port Reassembly 49 Orbiting Plate Assembly 53 Orbiting Plate Exploded View 53 Orbiting Plate Assembly 55 Install the Beari...

Page 4: ...TriScroll 300 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 4 2 9 0 4 ...

Page 5: ... se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione è conforme alla e sequente I norma o documento I normativo i Frederick C Campbell Operations Manager Vacuum Technologies We Wir Nous Nosotros Wij Noi Lexington MA 02421 3133 USA 121 Hartwel...

Page 6: ...quipment They must know how to recognize hazardous and potentially hazardous conditions and know how to avoid them The consequences of work performed by unskilled or improperly trained maintenance personnel or careless operation of the equipment employed in the specified maintenance procedures can be serious Every maintenance person must read and thoroughly understand the materials discussed and t...

Page 7: ...urs CAUTION Wipe all O rings clean with a lint free cloth before installation to ensure that no foreign matter is present to impair the seal Do not use alcohol methanol or other solvents on O rings To do so causes deterioration and reduces their ability to hold a vacuum If applicable apply a small amount of Krytox GPL 224 grease and wipe the O rings shiny dry NOTE Vacuum Technologies recommends re...

Page 8: ...nstallation and Operation Manual All TriScroll 300 Series Models 699904265 Description Contents Applicable TriScroll Model Part Number Major Maintenance Tool Kit All bearings bearing seals bearing lubricant O rings and tip seals required to rebuild TriScroll 300 Series pumps All TriScroll 300 Series models PTSS0300MK Maintenance Tool Kit All fixtures and tools required to perform any maintenance o...

Page 9: ...t Varian Inc office if mating hardware is required Contacting Vacuum Technologies In the United States you can contact Vacuum Technologies Customer Service at 1 800 8VARIAN See the back cover of this manual for a listing of our sales and service offices Internet users Send email to Customer Service Technical Support at vpl customer support varianinc com Visit our web site at www varianinc com vacu...

Page 10: ...TriScroll 300 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 4 2 9 0 4 ...

Page 11: ...humming or grinding noises from the bearings Main bearing life may be shortened if your application requires the pumping of high quantities of water vapor Use of the bearing purge will keep this water from impacting bearing life Required Equipment Maintenance Tool Kit PTSS0300TK page 2 Major Maintenance Kit PTSS0300MK page 4 Arbor Press 1 2 ton or larger 10 work diameter capacity 8 capacity over t...

Page 12: ...2 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 Maintenance Tool Kit ...

Page 13: ...3 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 Maintenance Tool Kit continued ...

Page 14: ...4 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 Major Maintenance Tool Kit Nylon Sleeve Shaft Seal 24x32x4 ...

Page 15: ...continued TS 300 O rings O ring Part Number Quantity Inside Diameter in Cross Section in 2 016 6 0 614 0 070 2 111 2 0 424 0 103 2 115 1 0 674 0 103 2 118 3 0 862 0 103 2 121 1 1 049 0 103 2 137 1 2 050 0 103 2 152 1 3 237 0 103 2 157 1 4 487 0 103 2 205 1 0 421 0 139 2 269 1 8 734 0 139 ...

Page 16: ...6 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 Tip Seal Tool Kit ...

Page 17: ...4 2 9 0 4 TriScroll 300 Disassembly Remove and Disassemble the Outboard Housing 1 Remove the three M5x16 screws that attach the cowling to the module 2 Remove the cowling 3 Remove the six M5x22 screws that attach the outboard cover to outboard housing ...

Page 18: ...oll Vacuum Pump D R A F T 4 2 9 0 4 4 Remove the outboard cover 5 Remove and discard the O ring 6 Remove the six M5x10 screws that attach the three sync crank covers to the outboard housing TriScroll 300 Disassembly continued ...

Page 19: ...Scroll Vacuum Pump D R A F T 4 2 9 0 4 7 Remove the sync crank covers 8 Remove and discard the O rings 9 Remove the two M5x16 screws that attach the intake clamp to the outboard housing TriScroll 300 Disassembly continued ...

Page 20: ... A F T 4 2 9 0 4 10 Remove the intake clamp and intake fitting 11 Remove and discard the O ring 12 Remove the six M6x45 screws that attach the outboard housing to inboard housing 13 Remove the outboard housing TriScroll 300 Disassembly continued ...

Page 21: ...11 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 14 Remove and discard the O ring 15 Remove and discard the three sync crank assemblies TriScroll 300 Disassembly continued ...

Page 22: ...12 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 16 Remove and discard the tip seals from the outboard housing TriScroll 300 Disassembly continued ...

Page 23: ...mp D R A F T 4 2 9 0 4 Remove and Disassemble the Orbiting Plate 17 Remove the snap ring that is holding the orbiting cup in the orbiting plate 18 Remove the orbiting cup 19 Remove and discard the O ring TriScroll 300 Disassembly continued ...

Page 24: ... 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 20 Use the locking nut wrench to hold the locking nut 21 Loosen the four M4x12 screws in the locking nut 22 Remove the locking nut TriScroll 300 Disassembly continued ...

Page 25: ...roll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 23 Remove the orbiting plate from the crankshaft 24 Remove and discard the tip seals from both sides of the orbiting plate TriScroll 300 Disassembly continued ...

Page 26: ... F T 4 2 9 0 4 25 Remove the six M5x5 set screws from the orbiting plate 26 Remove the three snap rings holding the needle bearings and shaft seals in the orbiting plate TriScroll 300 Disassembly continued NOTE Set screws are held in with Loctite ...

Page 27: ... Vacuum Pump D R A F T 4 2 9 0 4 27 Push out and discard the three needle bearings and shaft seals 28 Remove and discard the six O rings from the three sync bearing bores in the orbiting plate TriScroll 300 Disassembly continued ...

Page 28: ...removing the orbiting plate from oven use the bearing extractor tool and arbor press to press out the two bearings orbiting spacer nylon sleeve and wave washer from the orbiting plate The parts are shown in the photo on page 19 TriScroll 300 Disassembly continued WARNING This step requires the use of heat resistant gloves Do not proceed without them ...

Page 29: ...te are Wave washer Nylon sleeve 7305WN SU bearing J9104P bearing Orbiting spacer 31 Allow the orbiting plate to air cool until it can be handled with bare hands This generally takes a few hours 32 Remove and discard the shaft seal from the orbiting plate TriScroll 300 Disassembly continued 1 2 4 5 3 ...

Page 30: ...20 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 33 Remove and discard the tip seal from the inboard housing TriScroll 300 Disassembly continued ...

Page 31: ...Vacuum Pump D R A F T 4 2 9 0 4 Remove and Disassemble the Inboard Housing 1 Remove the four M6x16 screws that attach the inboard housing to the frame 2 Remove the inboard housing from the frame TriScroll 300 Disassembly continued ...

Page 32: ...A F T 4 2 9 0 4 3 Remove the M8x12 screw and washer that attach the fan assembly to the crankshaft then remove the fan assembly 4 Remove the three M5x10 screws that hold the seal housing to the inboard housing TriScroll 300 Disassembly continued ...

Page 33: ... Scroll Vacuum Pump D R A F T 4 2 9 0 4 5 Remove the seal housing 6 Remove and discard the O rings and the shaft seal from seal housing 7 Remove the shaft seal spacer from the crankshaft TriScroll 300 Disassembly continued ...

Page 34: ... T 4 2 9 0 4 8 Push the crankshaft out of the inboard housing 9 Remove the key from slot in the crankshaft 10 Remove and discard the O ring from the crankshaft 11 Remove the two pipe plugs from the inboard housing TriScroll 300 Disassembly continued ...

Page 35: ... 2 9 0 4 12 Remove the snap ring that is holding the check valve plug in the inboard housing 13 Remove the check valve plug by installing an M4 screw and then pulling out the plug 14 Remove and discard the two O rings TriScroll 300 Disassembly continued ...

Page 36: ...he hemostat pliers remove the two check valves two small springs one large spring two plunger guides and one spacer from the port in the inboard housing 16 Remove the snap ring that is holding the exhaust fitting in the inboard housing TriScroll 300 Disassembly continued ...

Page 37: ...aust fitting 18 Remove and discard the O ring 19 Using the hemostat pliers remove the large spring plunger guide small spring and check valve from the exhaust port in the inboard housing TriScroll 300 Disassembly continued NOTE The next step applies to all models except the 310 ...

Page 38: ...ed from the exhaust are Large spring Plunger guide Small spring Check valve 20 Heat the inboard housing for a minimum of 1 hour in a 350 o F oven TriScroll 300 Disassembly continued 1 2 3 4 WARNING This step requires the use of heat resistant gloves Do not proceed without them ...

Page 39: ...ring spacer and wave washer from inboard housing 22 Use the main bearing extractor tool to push bearings out if the bearings do not fall out The parts removed from the inboard housing are Bearing spacer 7205W SU bearing included in maintenance kit 7305WN SU bearing included in maintenance kit Wave washer TriScroll 300 Disassembly continued 1 2 3 4 ...

Page 40: ...th a chisel to loosen the tip seal dust from the orbiting plate inboard and outboard housing If seal debris is attached to the sides of the scroll walls use a razor balde or Exacto knife to scrape this debris off 26 Use dry compressed air to remove the tip seal debris 27 Clean all the parts 28 Ensure that all parts are dry TriScroll 300 Disassembly continued NOTE The use of an industrial detergent...

Page 41: ...iew Callout Part Number Description Quantity MK 2 115 Viton O ring 1 MK 7305WN SU Bearing 1 S4770001 VDS4 Bearing Spacer 1 S4769001 Wave Washer Crank 1 MK 7205W SU Bearing 1 S4711001 VDS4 Crankshaft 1 MK Included in major maintenance kit TSK Included in tip seal kit NSS Not sold separately 1 2 5 6 7 3 ...

Page 42: ... following parts shown in the photo to the left Crankshaft Bearing spacer 7205W SU bearing included in maintenance kit Seal spacer 7305WN SU bearing included in maintenance kit Wave washer crank O ring 2 115 included in maintenance kit Locate the following parts in the photo to the left Bearing pre load tool Washer M8x12 screw 5x5x12 key 1 Install the wave washer onto the crankshaft 1 2 4 5 6 7 3 ...

Page 43: ...all 7205W SU bearing on crankshaft 3 Install bearing spacer on crankshaft 4 Install 7305WN SU bearing on crankshaft Assemble the Crankshaft continued Observe Proper Orientation Toward Wave Washer Observe Proper Orientation Observe Proper Orientation Toward Wave Washer ...

Page 44: ...e O ring and install it in the groove on the crankshaft 6 Install the key in the slot 7 Install the seal spacer over the O ring 8 Slide the bearing pre load tool onto the crankshaft engaging key and secure it with the M8x12 screw and washer Assemble the Crankshaft continued O RING ...

Page 45: ...35 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 Inboard Housing Assembly Inboard Housing Exploded View 1 2 4 6 7 8 9 3 10 19 20 11 12 13 14 15 16 17 18 21 22 23 24 5 15 5 6 7 6 7 5 ...

Page 46: ...Check Valve Spacer 1 1 S4723001 VDS4 Check Valve Assembly 2 3 660285573 Spring S S 18 OD x 75 L x 014 Wire OD 2 3 S4720001 VDS4 Plunger Guide 2 3 660285565 Spring S S 60 OD x 50 L x 045 Wire OD 1 1 NSS VDS4 Inboard Housing 1 1 NSS Dowel Pin Steel M6x16 2 2 660285568 Spring S S 60 x 1 50 L x 045 Wire OD 1 S4706001 VDS4 Exhaust Fitting 1 1 MK Included in major maintenance kit TSK Included in tip sea...

Page 47: ... 1 1 S4712001 VDS4 Seal Housing 1 1 NSS Screw Socket Head Cap M5x10 Black Steel 3 3 NSS VDS4 Fan Assembly 1 1 NSS Washer 11 32 x 3 4 x 1 8 1 1 NSS Screw Socket Head Cap M8x12 Black Steel 1 1 MK O ring Viton 2 140 1 1 Callout Part Number Description Quantity PTS03101UNIV PTS03103UNIV PTS03001UNIV PTS03003UNIV MK Included in major maintenance kit TSK Included in tip seal kit NSS Not sold separately ...

Page 48: ... 2 9 0 4 Inboard Housing Assembly Insert the Shaft Seal Tools required Arbor press Seal installation tool Krytox GPL 224 grease Locate the following parts shown in the photos to the left Shaft seal 32x42x4 included in maintenance kit Inboard housing 1 2 ...

Page 49: ...sing Krytox GPL 224 grease the inner diameter of the shaft seal between its lips 2 Using the seal insertion tool press the shaft seal 32x42x4 into the bore of inboard housing from the fin side Inboard Housing Assembly continued Observe Proper Orientation Into Bore ...

Page 50: ...ls required Cooling stand Gloves Locate the following items Crankshaft assembly Inboard housing 1 Heat the inboard housing for a minimum of 1 hour in a 350 o F oven Inboard Housing Assembly continued WARNING This step requires the use of heat resistant gloves Do not proceed without them ...

Page 51: ...d housing from oven push the crankshaft assembly into the inboard housing external threads first 3 Place assembly in cooling stand and allow to air cool Inboard Housing Assembly continued WARNING Assembly is hot Use heat resistant gloves for this step CAUTION Be careful not to let crankshaft drop out ...

Page 52: ...se Locite 242 Locate the following parts shown in the photo on the left Seal housing Shaft seal 32x42x4 included in maintenance kit M5x10 screw 3 O ring 2 152 included in maintenance kit O ring 2 140 included in maintenance kit 1 Spread a thin film of Locite 242 onto the outer surface of the shaft seal 32x42x4 Inboard Housing Assembly continued 4 5 3 1 2 ...

Page 53: ...ameter of the shaft seal between lips 4 Remove the screw washer and bearing pre load tool from crankshaft 5 Lightly grease the 2 152 O ring and insert it into the outer groove on the seal housing 6 Lightly grease the 2 140 O ring and insert it into the middle groove on the seal housing Inboard Housing Assembly continued Observe Proper Orientation ...

Page 54: ... slot in the crankshaft 10 Slide the fan assembly onto the crankshaft engaging the key and against the seal spacer 11 Secure with the M8x12 screw and washer previously removed see page 22 12 Tighten screws to 250 in lb Inboard Housing Assembly continued CAUTION Avoid damage to the seal Carefully rocking the seal housing onto the crank shaft will avoid damage to the seal during installation ...

Page 55: ...nch Loctite PST 567 pipe sealant included in maintenance kit Locate the following parts Breather Vent PTS03001UNIV and PTS03003UNIV 1 required 1 4 NPT brass plug PTS03001UNIV and PTS03003UNIV 1 required PTS03101UNIV and PTS03103UNIV 2 required Inboard Housing Port Definition Inboard Housing Assembly continued 1 2 ...

Page 56: ...NIV and PTS03103UNIV only 1 Apply a small amount of Loctite PST 567 pipe sealant to the first few threads of 1 4 NPT brass plug 2 Insert the plug into the air ballast port and tighten 3 Apply a small amount of Loctite PST 567 pipe sealant to the first few threads of the second 1 4 NPT brass plug 4 Insert the plug into the bearing purge port and tighten Inboard Housing Assembly continued NOTE The p...

Page 57: ... Spring small Check valve assembly Exhaust fitting O ring 2 205 included in maintenance kit Snap ring PTS03001UNIV and PTS03003UNIV only 1 Place the small spring onto the plunger guide 2 Place the check valve onto the plunger guide 3 Insert the check valve assembly check valve first into the exhaust port on the inboard housing 4 Observe the proper orientation as shown in photo on the left Inboard ...

Page 58: ...UNIV only Tools required Right angle snap ring pliers Krytox GPL 224 grease Locate the following parts Exhaust fitting O ring 2 205 included in maintenance kit Snap ring 1 Lightly grease the O ring then install it in the groove on exhaust fitting 2 Place the snap ring on the exhaust fitting The snap ring must be bent slightly to fit around the exhaust fitting Inboard Housing Assembly continued 3 1...

Page 59: ...e in the exhaust port Bypass Port Reassembly Tools required Right angle snap ring pliers Bypass plug insertion tool Krytox GPL 224 grease Locate the following parts Check valve spacer Plunger guide 2 Check valve assembly 2 Spring small 2 Spring large O rings 2 111 2 included in maintenance kit Check valve plug Snap ring not shown Inboard Housing Assembly continued 4 5 6 7 3 1 2 3 4 2 ...

Page 60: ...ng 8 Observe the proper orientation as shown in the photo on the left 9 Insert the large spring into the bypass port pushing against the plunger guide 10 Place the small spring onto the plunger guide 11 Place the check valve onto the plunger guide 12 Insert the check valve assembly plunger guide first into the exhaust port on the inboard housing 13 Observe the proper orientation as shown in the ph...

Page 61: ...the grooves on the check valve plug 16 Insert the bypass plug insertion tool into the guide hole above the post 17 Insert the check valve plug into bypass port against the check valve spacer 18 Observe the proper orientation as shown in photo on the left Inboard Housing Assembly continued CAUTION Be careful not to cut the O ring on the 1 4 diame ter cross port in the bypass of the inboard housing ...

Page 62: ...52 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 19 Secure the check valve plug by inserting the snap ring into the bypass port groove Inboard Housing Assembly continued ...

Page 63: ...53 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 Orbiting Plate Assembly Orbiting Plate Exploded View 1 2 4 5 6 7 8 9 3 10 11 12 11 11 11 ...

Page 64: ...ylon Sleeve 1 MK J9104P x1527 Bearing 1 S4758001 Wave Washer Nested 1 NSS VDS4 Center Orbiting Plate 1 NSS DIN472 0150 Snap Ring 3 MK Shaft Seal 8x15x3 3 MK NK 8 12 Needle Bearing 3 MK 2 016 Viton O ring 6 NSS M5x5 Set Screw 6 MK Shaft Seal 24x32x4 1 MK Included in major maintenance kit TSK Included in tip seal kit NSS Not sold separately 1 2 3 4 5 6 7 8 9 10 11 12 ...

Page 65: ...n maintenance kit Orbiting plate not shown in photo 1 Heat the orbiting plate for a minimum of 1 hour in 350 oF oven While the orbiting plate is heating prepare the bearing fixture The posts of the orbiting plate bearing fixture have two different sized bottom disks Use the end that has the larger of the bottom disks 2 Remove the nut and the seal with the larger bottom disk from the fixture in pre...

Page 66: ...bearing sealed side toward the bore 4 Immediately and while the orbiting plate is still hot drop the nylon sleeve into bore and around the J9104P bearing 5 Drop the orbiting spacer on top of the nylon sleeve Orbiting Plate Assembly continued WARNING Assembly is hot use heat resistant gloves WARNING Assembly is hot use heat resistant gloves ...

Page 67: ... with the open end of the J9104P bearing 7 Immediately while orbiting plate is still hot insert the 7304WN SU bearing into the bore and against the orbiting spacer Orbiting Plate Assembly continued WARNING Assembly is hot use heat resistant gloves WARNING Assembly is hot use heat resistant gloves Observe Proper Orientation Toward Bore ...

Page 68: ...ting plate to air cool completely 11 Once it is cooled remove the orbiting plate from the orbiting plate fixture 12 Replace the seal and tighten the nut onto the orbiting plate fixture Install the Wave Washer and Shaft Seal Tools required Allen wrench Arbor press Seal installation tool Krytox GPL 224 grease Loctite 242 Locate the following parts Wave washer nested M5x5 set screw 6 Shaft seal 24x32...

Page 69: ...ount of Loctite 242 to the lower threads of the six M5x5 screws then install one screw into each threaded hole in the orbiting plate 2 Tighten the screws until they are slightly below the surface 3 Install the wave washer into the orbiting plate Orbiting Plate Assembly continued ...

Page 70: ...e of the shaft seal 5 Place the shaft seal onto the shaft seal installation tool 6 Using the shaft seal installation tool press the shaft seal into the orbiting plate 7 Apply Krytox GPL 224 to the inner diameter of the seal between the lips Orbiting Plate Assembly continued Observe Proper Orientation Toward Bore ...

Page 71: ...Krytox GPL 224 grease Locate the following part in the photo on the left Orbiting plate Locate the following parts in the photo on the left Snap rings 3 O rings 2 016 6 included in maintenance kit Needle bearing 3 included in maintenance kit Shaft seals 8x15x3 3 included in maintenance kit Orbiting Plate Assembly continued 1 1 2 3 4 ...

Page 72: ... insert them into the two grooves in each of three sync crank bearing bores in the orbiting plate 2 Push one needle bearing into each bearing bore 3 Squeeze a 1 4 diameter dot of Krytox into each of the three needle bearings 4 Smear grease over all the needles Orbiting Plate Assembly continued ...

Page 73: ...t the lips of the three shaft seals with grease 6 Insert one shaft seal into each bore against the needle bearing 7 Secure the sync crank by inserting the snap ring into the bearing bore groove Orbiting Plate Assembly continued Observe Proper Orientation Toward Bore ...

Page 74: ...TriScroll 300 Dry Scroll Vacuum Pump This page intentionally left blank D R A F T 4 2 9 0 4 ...

Page 75: ... Vacuum Pump D R A F T 4 2 9 0 4 TriScroll 300 Assembly TriScroll 300 Exploded View 11 303 only 1 2 7 8 9 10 19 20 11 12 13 14 15 16 17 18 21 22 23 24 25 26 27 28 29 30 31 32 34 35 36 37 38 39 41 42 43 52 6 4 5 3 3 19 19 28 19 32 ...

Page 76: ... ring 1 1 1 1 S4705001 VDS4 Cowling 1 1 1 1 NSS M5x10 SHCS Black Steel 6 6 6 6 S4717001 VDS4 Sync Crank Cover 3 3 3 3 MK 2 118 Viton O ring 3 3 3 3 MK VDS4 Sync Crank Assembly 3 3 3 3 NSS M6x45 SHCS Black Steel 6 6 6 6 NSS VDS4 Outboard Housing 1 1 1 1 MK 2 121 Viton O ring 1 1 1 1 S4709001 VDS4 NW25 Intake Fitting 1 1 1 1 S4724001 VDS4 Intake Screen 1 1 1 1 NSS N5000 106 Snap Ring 1 1 1 1 MK Incl...

Page 77: ...69 Viton O ring 1 1 1 1 NSS TS300 Inboard Assembly 1 1 642971040 Breather Vent 1 1 NSS 1 4 Brass Plug 2 2 1 1 670086120 Spider L075 Open 1 1 1 1 622471058 Coupling L075 W 15 mm Key 1 1 1 1 NSS M8x16 SHCS 4 4 4 4 NSS M6x16 SHCS 6 6 6 6 S4721001 VDS4 Handle 1 1 1 1 S4743001 VDS4 3 4 HP Single Phase Motor 1 1 Callout Part Number Description Quantity PTS03103UNIV PTS03101UNIV PTS03003UNIV PTS03001UNIV...

Page 78: ...x12 Socket Head Button Screw 4 4 4 4 NSS Arrow Decal 1 1 1 1 660288087 SSB 0087 Wave Spring 3 3 3 3 S4707002 VDS4 NW16 Pipe Fitting 1 1 1 NSS TS310 Inboard Assembly 1 1 Callout Part Number Description Quantity PTS03103UNIV PTS03101UNIV PTS03003UNIV PTS03001UNIV MK Included in major maintenance kit TSK Included in tip seal kit NSS Not sold separately 36 37 38 39 41 42 43 52 ...

Page 79: ...69 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 Final Assembly Tools required Allen wrench Locate the following items Inboard housing assembly Spider coupling M6x16 screws 4 1 2 3 ...

Page 80: ...otor coupling 2 Install the inboard assembly into the TriScroll frame aligning the fingers on the fan assembly with the fingers on the coupling Ensure that the dowel pins fit properly on the mating holes in frame Final Assembly continued NOTE Exhaust fitting located in the downward position ...

Page 81: ...71 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 3 Secure the inboard assembly to the frame with the four M6x16 screws Final Assembly continued ...

Page 82: ...ers Allen wrench Depth Gauge Krytox GPL 224 grease Locate the following parts Orbiting plate assembly Locate the following parts O ring large 2 269 included in maintenance kit Orbiting cup Locking nut O ring small 2 137 included in maintenance kit Snap ring Tip seals included in maintenance kit Final Assembly continued 1 1 2 4 5 6 3 ...

Page 83: ...the orbiting plate assembly onto the crankshaft and into the inboard housing Final Assembly continued NOTE The balance fin on the orbiting plate should be ori ented in the downward position when sliding the orbiting plate onto the crankshaft and into the inboard housing ...

Page 84: ... nut 4 Tighten snugly with locking nut wrench 5 Measure the distance from the face of the locking nut to the crankshaft end using the depth gauge 6 Note and record the distance 7 Disassemble the locking nut and orbiting plate assembly from the inboard assembly Final Assembly continued CAUTION Do not overtighten Overtightening can cause bearing damage Date Distance ...

Page 85: ...seal into the scroll tip grooves on the inboard housing 9 Cut to the correct length at the end of each groove 10 Insert the tip seal into the scroll tip grooves on the inboard side of orbiting plate 11 Cut to the correct length at the end of each groove Final Assembly continued ...

Page 86: ...he distance noted in step 6 on page 74 plus 0 007 inch 14 Secure the locking nut by installing the four M4x12 locking screws 15 Use the locking nut wrench to maintain the locking nut position while tightening the locking screws 16 Ensure that all four locking screws are tightened to at least 40 in lb 17 Insert tip seal in scroll tip grooves on orbiting plate 18 Cut to length at the end of each gro...

Page 87: ...ing plate 21 Push the orbiting cup into place and hold it securely while engaging the snap ring Final Assembly continued CAUTION If the orbiting cup slips out prior to installing the snap ring remove the orbiting cup re install the O ring and re insert the orbiting cup into the orbiting plate Use care not to shear the O ring while pushing the orbiting cup into the orbiting plate ...

Page 88: ...ound the lip of the inboard housing Install the Outboard Housing Tools required Snap ring pliers Allen wrench Krytox GPL 224 grease Locate the following items shown in the photo to the left Intake fitting M5x16 screws 2 O ring 2 121 included in maintenance kit Intake clamp Final Assembly continued O RING 1 2 3 4 ...

Page 89: ... 0 4 Locate the following items shown in the photo to the left Tip seal included in maintenance kit M6x45 screws 6 Outboard housing not shown in photo 1 Lightly grease the O ring and insert it in the groove on the intake fitting Final Assembly continued 1 2 ...

Page 90: ...tting over the intake hole in the outboard housing 3 Slide the intake clamp around the intake fitting 4 Secure it with two M5x16 screws 5 Tighten to 75 in lb 6 Insert the tip seals in the grooves on the outboard housing 7 Cut to length at the end of grooves Final Assembly continued ...

Page 91: ...he outboard housing over the orbiting plate and against the inboard housing engaging the dowel pins 9 Secure the outboard housing to the inboard housing with the six M6x45 screws 10 Tighten the screws sequentially in a diagonal pattern to 130 in lb Final Assembly continued ...

Page 92: ...ts shown in the photo at the left O ring 2 118 3 included in maintenance kit Sync crank cover 3 M5x10 screws 6 Sync crank assembly 3 included in maintenance kit 3 1 Insert one sync crank assembly into each of three bores in the outboard housing 2 Ensure that the pin on the sync crank assembly end engages with the needle bearing in the orbiting plate Final Assembly continued 1 2 3 4 ...

Page 93: ... 2 9 0 4 3 Lightly grease the three O rings and insert them into the grooves on the three sync crank covers 4 Install one sync crank cover over each sync crank bore 5 Secure each cover with two M5x10 screws 6 Tighten to 75 in lb Final Assembly continued ...

Page 94: ...er Tools required Allen wrench Krytox GPL 224 grease Locate the following parts Cowling Outboard cover O ring 2 157 included in maintenance kit M5x22 screws 6 M5x16 screws 3 1 Lightly grease the O ring and insert it into the groove on the outboard cover Final Assembly continued 1 2 3 4 5 ...

Page 95: ...85 TriScroll 300 Dry Scroll Vacuum Pump D R A F T 4 2 9 0 4 2 Secure the outboard cover to the outboard housing with the six M5x22 screws Final Assembly continued ...

Page 96: ... is required before base pressure of 10 mTorr can be achieved 3 Install the cowling over the pump module 4 Secure it with the three M5x16 screws This figure illustrates a fully reassembled TriScroll 300 pump NOTE The 24 hour run time does not have to be continuous If your application requires a low base pressure it is wise to run the pump for the 24 hour period for optimum performance Final Assemb...

Page 97: ...F lli Varian 54 10040 Leini TO ITALY Fax 39 011 997 9350 Varian Vacuum Technologies Local Office For a complete list of phone fax numbers see www varianinc com vacuum Do not write below this line Notification RA Customer ID Equipment CUSTOMER INFORMATION Company name Contact person Name Tel Fax E mail Ship method Shipping Collect P O Europe only VAT Reg Number USA only Taxable Non taxable Customer...

Page 98: ...Message Bad feedthrough Poor vacuum Main seal leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Describe failure Describe failure Customer application Customer application Cannot calibrate No zero high background Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication ...

Page 99: ......

Page 100: ...aly Tel 39 011 997 9 111 Fax 39 011 997 9 350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Building 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Val...

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