Varian TriScroll 300 Series, Maintenance Manual

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TriScroll 300 Dry Scroll Vacuum Pump
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Table of Contents
Declaration of Conformity
Preface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . vi
Safety Considerations . . . . . . . . . . . . . . . . . . . . . vi
Related TriScroll Manuals . . . . . . . . . . . . . . . . . viii
Maintenance and Tool Kits . . . . . . . . . . . . . . . . viii
Factory Service Options . . . . . . . . . . . . . . . . . . . ix
Serial Number Notes . . . . . . . . . . . . . . . . . . . . . . ix
Contacting Vacuum Technologies . . . . . . . . . . . . ix
Major Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . 1
General Information . . . . . . . . . . . . . . . . . . . . . . 1
Required Equipment . . . . . . . . . . . . . . . . . . . . . . 1
Maintenance Tool Kit . . . . . . . . . . . . . . . . . . . . . 2
Major Maintenance Tool Kit . . . . . . . . . . . . . . . . 4
Tip Seal Tool Kit . . . . . . . . . . . . . . . . . . . . . . . . . 6
TriScroll 300 Disassembly . . . . . . . . . . . . . . . . . . . . 7
Remove and Disassemble the
Outboard Housing . . . . . . . . . . . . . . . . . . . . . . . 7
Remove and Disassemble the Orbiting Plate . . . 13
Remove and Disassemble the
Inboard Housing . . . . . . . . . . . . . . . . . . . . . . . . 21
Crankshaft Assembly . . . . . . . . . . . . . . . . . . . . . . . 31
Crankshaft Exploded View . . . . . . . . . . . . . . . . 31
Assemble the Crankshaft . . . . . . . . . . . . . . . . . . 32
Inboard Housing Assembly . . . . . . . . . . . . . . . . . . . 35
Inboard Housing Exploded View . . . . . . . . . . . . 35
Inboard Housing Assembly . . . . . . . . . . . . . . . . 38
Insert the Shaft Seal . . . . . . . . . . . . . . . . . . . . 38
Insert the Crankshaft . . . . . . . . . . . . . . . . . . . . 40
Insert the Seal Housing . . . . . . . . . . . . . . . . . . 42
Install the Vents and Plugs . . . . . . . . . . . . . . . 45
Exhaust Port Reassembly . . . . . . . . . . . . . . . . 47
Bypass Port Reassembly . . . . . . . . . . . . . . . . . 49
Orbiting Plate Assembly . . . . . . . . . . . . . . . . . . . . . 53
Orbiting Plate Exploded View . . . . . . . . . . . . . . 53
Orbiting Plate Assembly . . . . . . . . . . . . . . . . . . . 55
Install the Bearing Assembly . . . . . . . . . . . . . . 55
Install the Wave Washer and Shaft Seal . . . . . 58
Install the Needle Bearings . . . . . . . . . . . . . . . 61
TriScroll 300 Assembly . . . . . . . . . . . . . . . . . . . . . . 65
TriScroll 300 Exploded View . . . . . . . . . . . . . . . 65
Final Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . 69
Install the Orbiting Plate . . . . . . . . . . . . . . . . . 72
Install the Outboard Housing . . . . . . . . . . . . . 78
Install the Sync Crank into the
Outboard Housing . . . . . . . . . . . . . . . . . . . . . 82
Replace the Cowling and Cover . . . . . . . . . . . 84
Put the Pump Back into Service . . . . . . . . . . . . . 86
Return for Request Health and Safety Certification
Sales and Service Offices