Ulvac VWR-400M/ERH Instruction Manual Download Page 1

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No.35043-2-02-7

Instruction Manual

Compact Vacuum Evaporator

DEPOX

(VWR-400M/ERH)

Ulvac Kiko,Inc.

Please read this manual thoroughly to ensure safe and effective
operation of this equipment.
Keep this manual in a safe place.

Please note that due to performance upgrade, the equipment described
in this manual is subject to changes in dimensions and specifications
without prior notice.

Summary of Contents for VWR-400M/ERH

Page 1: ...o Inc Please read this manual thoroughly to ensure safe and effective operation of this equipment Keep this manual in a safe place Please note that due to performance upgrade the equipment described i...

Page 2: ...ns that are Prohibited 2 2 Safety Device and its Purpose and Functions 2 3 Product Specifications 3 4 Individual Unit Specifications 4 5 Standard Accessories 5 6 How to Use Switches Handles and Operat...

Page 3: ...recovery 17 5 4 Instantaneous water outage 17 5 5 Long water outage 17 5 6 Operation after water recovery 17 5 Maintenance and repair 18 1 Risks and Safety Measure upon Maintenance and Repair 18 2 Ma...

Page 4: ...duced without permission of Ulvac Kiko Inc Read this section before using the VWR 400M ERH Always follow the instructions below to safely use the device and prevent personal injuries from occurring Th...

Page 5: ...connected with it Breaker capacity shortage may cause the breaker to trip due to overcurrent during the operation Ground the grounding wire Employ Level D grounding The grounding wire is the green wir...

Page 6: ...human health Ventilate Pump is heated during operation Room temperature rises Warning Check the environment Install the equipment where the following conditions are satisfied 1 Flat surface 2 Floor w...

Page 7: ...loves to protect your hands If liquid nitrogen splashes and adheres to your skin you may feel acute pain momentary Leave open air After the oil sealed rotary vacuum pump stops open BACK P VENT or RP V...

Page 8: ...of the wire rope for the accompanying lift sold separately If they are loose the bell jar could accidentally drop Caution Work by two or more people Installation and removal of the oil diffusion pump...

Page 9: ...caused by modifications or repairs carried out by a party other than the manufacturer or by a service company not approved by the manufacturer e Malfunctions caused by noise electric disturbance f Ma...

Page 10: ...rbishing of the product that are not permitted by us Avoid this action 2 Safety Device and its Purpose and Functions Item Purpose Functions How to Check Current leakage Preventing electrical shock Use...

Page 11: ...rogen upon no load cleaning in vacuum chamber Necessary power 100 V single phase 1 6 kVA 200 V single phase 1 5 kVA Necessary water 2 L min Water temperature 20 C to 25 C Water pressure 200 kPa to 300...

Page 12: ...c 1 set 1 set 5 set 3 set 3 Evaporation power supply Model PSE 150C Dimensions W480 mm D435 3 mm H149 mm Input Single phase 200 V Output 150 A max Rating 30 minutes Control method Thyristor AC phase c...

Page 13: ...3W 25K Bore diameter 20 A 1 set 9 Vacuum gauge Model ISG1 Gauge head M 34 WP 01 1 set Refer to the specification sheet for special models 5 Standard Accessories 1 Power supply cable For the main unit...

Page 14: ...ON lamp illumination MAIN P or D P switch Manual ON OFF ON lamp illumination MAIN valve handle Counter clockwise OPEN Clockwise CLOSE Three way valve Lever operation to the direction or FORE CLOSE or...

Page 15: ...7 7 Layout of Switches Handles and Operation Levers...

Page 16: ...8 Evacuation system drawing Electrical system drawing...

Page 17: ...ion Site Warning Check the environment Install the equipment where the following conditions are satisfied 1 Flat surface 2 Floor with sufficient strength 3 Well ventilated place 4 Place without direct...

Page 18: ...se the breaker to trip due to overcurrent during the operation Ground the grounding wire Employ Level D grounding The grounding wire is the green wire If incorrect grounding is made this may cause ele...

Page 19: ...11 Evaporator electrode power output diagram...

Page 20: ...braided hose prepared by a user Internal diameter 9 mm Outer diameter 15 mm Caution Fix piping Piping for cooling water should be secured with a tool less joint This is done to prevent water leakage N...

Page 21: ...when using liquid nitrogen because the oxygen content may be decreased due to increase of liquid nitrogen gases This may cause an oxygen deficiency accident Caution Wear gloves When using liquid nitr...

Page 22: ...quid nitrogen as necessary Reference Liquid nitrogen quantities Liquid nitrogen trap is optional Fill to a maximum of 1 4 L including vaporization 1 4 L should last five to six hours Once the liquid n...

Page 23: ...ening will help prevent contamination Opening the vacuum chamber to the atmosphere could cause contamination by allowing moisture to enter Vent V coupler Synflex coupler C1N1 4 PT1 8 appurtenant part...

Page 24: ...mation 5 Turn on the evaporator power switch 6 The current is gradually thrown to the evaporation source pushing the UP key 7 Once the evaporation element is red hot and the vapor source has started t...

Page 25: ...rocedure 2 1 Preparation Please refer to 2 2 Operations 5 4 Instantaneous water outage All devices automatically return to the conditions before the water outage 5 5 Long water outage Devices are stop...

Page 26: ...our back Check Check everyday for looseness of the fixture clips and eyebolts of both ends of the wire rope for lift sold separately If they are loose the bell jar could accidentally drop Caution Work...

Page 27: ...rimary power supply of the coater is removed Confirm Remove the side panel and rear panel optional if they are attached Remove the clamp and the flexible tube Remove the motor wiring 2 locations Remov...

Page 28: ...enter ring Remove the tightening bolt from the suction opening flange Remove it while supporting the oil diffusion pump Draw the oil diffusion pump forward and take it out 3 Oil heater replacement Ref...

Page 29: ...t the rod into the lower part of the oil mist trap to fix 3 4 Glass bell jar O ring 1 Required tools None 2 Removal procedure Remove the O ring In this case do not cause any damage on the O ring groov...

Page 30: ...p Replace oil If the ultimate pressure and the exhaust time is changed after an incorrect air intake If the ultimate pressure and the exhaust time is changed after long years of continuous use As nece...

Page 31: ...gas release was used e g resin substrate Change the material Take longer evacuation time Failure in the oil sealed vacuum pump Refer to the Oil Sealed Vacuum Pump User s Manual Failure in measuring in...

Page 32: ...ist Location of Use Parts Specifications Material Quantity Replacemen t by user Feed through collar O ring for flange P315 NBR 1 OK Center ring O ring for KF port NW16 KF16 FPM 1 OK O ring for service...

Page 33: ...kW 1 OK Oil sealed rotary vacuum pump Oil SMR 100 1 OK Vibration control rubber ME 20 4 OK Three way valve O ring S 42 Attached component FPM 3 NG O ring P 25 Attached component FPM 2 NG O ring P 10A...

Page 34: ...Applications Installation conditions Two point evaporation electrode switching 2 point switching vapor deposition Factory assembled Two point evaporation electrode simultaneous 2 point simultaneous va...

Page 35: ...port For gas intake into the vacuum chamber Installable by user Evaporation power supply SEREM Power supply for deposition with external automatic control function Film formation speed control can be...

Page 36: ...ow from the exhaust opening of the oil sealed rotary vacuum pump Installable by user Oil mist Trap Inline type To prevent oil and smoke flow from the exhaust opening of the oil sealed rotary vacuum pu...

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