Ulvac PBL Series, Instruction Manual

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We recommend using water that contains few impurities (e.g.,
industrial water; refer to the table below).
We recommend using water that contains few impurities as cooling water
for this pump (e.g., refer to Table 9 [Reference] Standard Quality of
Industrial Water in Japan).
Depending on water quality, water stains from calcium carbonate or other
substance may accumulate inside the pump's cooling water system,
reducing the amount of cooling water. In addition, chlorine ions may
corrode the inner wall, causing cooling water to leak.
If using pure water, metal may elute, causing cooling water to leak. Note in
advance that in such cases, we may charge for repair.
[Reference]Standard Quality of Industrial Water in Japan
Turbidity pH Alkalinity Hardness
Evaporation
residue
Chlorine
ions
Iron Manganese
20 mg/L
or less
6.5 to
8.0
75 mg/L
or less
120 mg/L or
less
250 mg/L or
less
80 mg/L
or less
0.3
mg/L or
less
0.2 mg/L or
less
Established by the Japan Industrial Water Association
(Industrial Water Quality Standards Establishment Committee).
Perform warming-up operation for approximately 60 minutes (recommended)
after starting.
We recommend performing warming-up operation for approximately 60 minutes after
starting so that the pump can fully exert its vacuum pumping performance.
Do not suction acids or other chemicals.
If the pump suctions acids or other chemicals, it may become out of order.