Ulvac PBL Series, Instruction Manual

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1
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To Ensure Safe Use
This chapter describes how to reduce risks as well as which dangerous behaviors must be
avoided for each work item.
1.1 Handling of This Pump
If you need an overhaul or repair or if you have a problem, contact our nearest service center.
This pump can exhaust inert gas (air, nitrogen, or argon).
If the pump exhausts other gas (toxic, combustible, corrosive, or explosive gas, or
gas that increases the susceptibility of substances), such gas may leak from the
pump's main unit or ignite or explode inside the pump. Therefore, do not use this
pump to exhaust such gases.
Install this pump in a ventilated room indoors.
If nitrogen or argon leaks, the lack of oxygen may cause suffocation.
Before installing or removing this pump, separate all energy sources (including
power and cooling water) from it.
If this pump sucks in toxic gas, both the pump's main unit and the lubricant will
become toxic. Keep this in mind during maintenance.
Install an appropriate filter, separator, and trap so that this pump does not suck in
liquid or solid particles.
This pump has been designed to conform to the rules in place when this document was created.
Conformity is not guaranteed because the applicable standards may change in the future.
Performance and safety may not be ensured if equipment connected to this pump does not
conform to the same rules or if the pump is altered. In such cases, we cannot guarantee (take
responsibility for) performance or safety.
Do not handle this pump if you have not undergone publicly recognized general safety training
(including on electrical and loading safety) in your country. The operator must attend such training.
Install and operate this pump according to the safety-related laws and regulations (such as fire
prevention laws and electrical wiring regulations) in your country.
If you do not inform us of the details of hazardous substances you have used or that the pump
exhausted a substance that is difficult to detoxify, we may refuse to maintain or otherwise handle
the pump. When requesting overhaul, maintenance, repair, or other work, fill out the Declaration
of Contamination attached to this document and submit it to the service center.