Ulvac PBL Series, Instruction Manual

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About This Document
To ensure this pump remains usable for a long time, before installing, operating, inspecting, or
maintaining it, be sure to read this document and fully understand the safety notes as well as the
pump's specifications and operating procedures.
Note that the specifications, prices, and other contents in this document are subject to change
without notice for improvement or other reasons. Changes are released as a revision that
updates the document number listed on the top-right corner of the instruction manual's cover.
Be sure to give this document to the end user who uses the product.
Copying this instruction manual in whole or in part for third parties without our permission is
strictly prohibited.
This document is intended for users whose native language is Japanese. If users whose native
language is not Japanese perform work related to this pump, thoroughly provide safety training
and handling instructions under your own responsibility.
Target Models
This document applies to PBL-02, PBL-04, PBL-06, PBL-10, PBL-14, and PBL-20.