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2
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1.1.3 Explosion
Cause
Preventive Procedure
Pump explosion is consequence of
excessive pressure inside the pump.
⇒
The maximum pressure inside the pump is
0.03 MPa (GAUGE).
If inlet pressure of the pump is higher
than 0.03 MPa (GAUGE), eliminate any
objects which may cause obstruct gas
flowing to the inlet port. When using oil
mist trap, exchange or clean them to
avoid gas flowing.
1.1.4 High Temperature
Cause
Preventive Procedure
① Temperature of the pump is high as shown
below
pump body → 70 ～ 80 ℃
motor → 70 ～ 80 ℃
Burn at high temperature.
⇒
②
High temperature surface of the pump may
cause to burn as a result of direct skin
contact by accident. Do not touch the
pump body during operation. Inspection
should be carried out after stopping and
cooling down the pump.
1.2 Material Safety Data Sheet (MSDS)
The chemical material, which is applied or possible to contact when operating this
pump are described. Read this manual carefully to understand characteristics of the
chemical material (vacuum pump oil) which is described on MSDS sheet. When applying
other vacuum pump oils besides the description in this manual, contact your local
ULVAC KIKO,Inc. Sales and Service Center.
MSDS presents the reference information of hazardous chemical material
to keep safety precautions. When handling the pump oil, it is necessary
to take proper and practical treatments, which are adapted handling the
oil. After understanding the above mention, these treatments must be done.
Therefore, MSDS is a not safety warranty.
