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Table-2 Scheduled Inspection
Inspect cycle
Inspect Item
Inspect content
Action item
Specified oil level
Recharge oil
Oil quantity
Oil contamination
Reddish brown or milky
white→abnormal
Black→not abnormal
Change oil
Sound & Vibration
Unusual sound & Unusual
vibration
Tighten bolts/nuts or
Contact your local
Representative
Every 3 days
Motor current
Specified rating
Confirm over current
source or Contact
your local
Representative
Surface
temperature rising
>45℃ UP →abnormal
Confirm over heat
source or Contact
your local
Representative
Weekly
Oil leak
Oil leak from seals or
plugs
Change seals, O-rings
or Contact your local
Representative
Mesh filter, inlet
port
Dust clogging
Clean the mesh filter
Every 3000hr or
Every half year
Pump oil
Inspect oil certainly Change oil
Every year
Spider
Broken spider
Change spider
(2)
Inspecting the pump oil quantity
Recharge the specified pump oil as oil level is always in the range (red circle
marking) of oil gauge during operating.
(3)
Inspecting the pump oil leakage
When happening the oil leakage from shaft seals or drain-plug seals, repair must
be needed. As our service center provides the specified O-rings or seals, please
contact your local ULVAC KIKO, Inc. service center.
(4)
Inspecting the mesh filter in the inlet port
Any dust included in evacuated gases may cause clog the mesh filter and down
pumping efficiency.
(5)
Inspecting the abnormal noise or vibration
Check up any loose screws and nuts.
