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UGA Series Universal Gas Analyzers
UGA Error Messages
4 –
30
“Bypass pump OFF”,
The bypass valve is not allowed to open, when the
roughing pump is not off (i.e. on or idle) and the bypass
pump is off.
3
Reserved
32
“Bypass valve CLOSED”,
The sample valve is not allowed to open, when the
roughing pump is not off and the bypass valve is CLOSED.
33
“Bypass valve OPEN”,
(1) The bypass pump is not allowed to turn off, when the
roughing pump is not off and the bypass valve is open.
(2) The roughing pump is not allowed to turn on or idle,
when the bypass pump is not on and the bypass valve
is open.
34
“Sample valve OPEN”,
(1) The bypass valve is not allowed to CLOSE, when the
roughing pump is not off and the sample valve is open.
(2) The roughing pump is not allowed to turn on or idle,
when the bypass pump is not on, and the sample valve
is open.
35
Reserved
36
“Roughing pump OFF”,
The turbo pump is not allowed to turn on or idle, when the
roughing pump is not on, or idle.
37
“Roughing pump ON”,
The vent valve is not allowed to turn on, when the
roughing pump is on.
38
“Rough pressure HIGH”,
The roughing pump is not allowed to turn idle, when
the roughing pressure is higher than 2 Torr.
39 – 40 Reserved
4.. Warning Error Messages
