Stanford Research Systems
UGA Series Universal Gas Analyzers
UGA Basics
1 –
In Fig. 1-5a, the main chamber is shown. It consists of a sample line
set, a cubic chamber, an RGA analyzer, a chamber heater (CHA),
and a thermocouple. The sample line set is composed of 1/8”-Ultra-
Torr connector, sample valve (SV), 40
m
m pinhole (50
m
m pinhole
for Option #3) port, bypass valve (BV), and bypass line. The sample
line set, the RGA analyzer, and the chamber heater are attached to a
2.75” cubic chamber as shown in Fig. 1-5a.
These components are covered by the heat insulating box. (Fig.
1-5b)
If Option #1 is ordered, a multiple inlet valve and its controller
are installed here. (Fig. 1-5b) If O100HC is ordered, a sample line
heater (SAM), a sample line heating jacket set, and an Ultra-Torr
connection set (heater and insulator) will be assembled as shown
in Fig. 1-5c.
1.2.3 Top Front Components
Figure 1-5a. Top Front Components
