Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
52
8.8.3 Source Re-assembly
Refer to the exploded views of the Alignment Jig shown on Page 41 and the Source Assembly shown
on Page 37 (open) or 40 (PVD).
1. Place the source alignment jig flat on the bench and slide in the source mounting ring, aligning the
extract plate’s barrel connector with the alignment mark on the jig.
2. Insert each of the four lengths of wire into the four castellations, which will hold the ceramic parts
in place while the source assembly is rebuilt.
3. Slide one ceramic tube (Item 3) down each of the wires and then a ceramic washer (Item 4).
4. Orientate the source plate so that the largest circular cutout is above the extract plate’s barrel
connector and carefully slide it down the wires and over the ceramic tubes.
5. Place one ceramic washer over each of the exposed ceramic tubes.
6. Orientate the repeller plate so the circular cutouts align with the two visible barrel connectors and
slide it down the wires over the ceramic tubes and onto the ceramic washers.
7. Place one ceramic washer over each of the exposed ceramic tubes.
8. Carefully remove one of the wires and replace with a M1.6 pan head screw (Item 2) and the M1.6
stainless steel washer (Item 1), which should be screwed down but not tightened, repeat this for the
remaining three wires.
9. Check that all the plates and ceramics are seated properly before tightening the screws fully. Be
careful not to over-tighten, as this will damage the ceramic spacers.
10. Push out the completed source assembly from the jig and place it on a clean, non-conducting
surface. Using an Ohmmeter, check that there are no short circuits present between any of the three
plates or the source mounting ring.
If any shorts are discovered, correct them before continuing.
11. The filament plate can now be re-fitted and the remaining connection made.
Once again, check all connections with an Ohmmeter before returning the analyser back to the
vacuum chamber.
