Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
51
8.8.1 Removing the ion source
1. Remove the analyser from the vacuum system, place it on the bench in an upright position (holding
the analyser in a small bench vice is recommended) and remove the filaments as described in Section
7.4.1.
2. Loosen the three M2 x 4 that secure the three insulated wires that run from the analyser flange
assembly to the Source, Repeller and extractor plates and slightly bend the wires out of the way.
3. Remove the four M2 x 4 screws (Item 2) that hold the source assembly to the filter assembly and
carefully withdraw the source assembly from the filter.
8.8.2 Dismantling the source assembly
Before proceeding with this section, please ensure that you have the correct Source
Alignment Jig and spare ceramics and screws available.
Refer to the exploded views of the Source Assembly shown on Page 37 (Open) or 40 (PVD).
1. Carefully unscrew the four M1.6 x 8 screws (Item 1) and withdraw them from the assembly.
2. Using tweezers, remove the four ceramic washers (Item 3), if undamaged keep in a safe, clean
place ready for the re-assembly.
3. The Repeller Plate (Item 4) can now be removed from the mounting ring.
4. Using tweezers, remove the four ceramic washers (Item 3) and the four ceramic tubes (Item2), if
undamaged keep safe as before.
5. The Source Plate (Item 5) can now be removed from the mounting ring.
This is normally as much as you will need to dismantle for cleaning or replacing source components.
The Extract plate does not usually require service, as it is furthest away from potential contamination.
However, if you wish to remove the Extract Plate, see the exploded view on Page 38.
