Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
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6.7 Shutting Down
The Cirrus should be left to run continuously unless it is not to be used for an extended period of time,
or it needs to be shut down for maintenance.
To shut down the Cirrus:
1. Switch off the Capillary and System heaters.
2. Switch off the quadrupole filaments.
3. Wait 10 minutes to allow the filaments to cool.
4. Stop the turbo by clicking the “Pump” button, you should be able to hear the pumps stop and the
vent valve open.
5. Wait 5 minutes for the system to cool further and come to a full stop.
