Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
40
3. From the side without a spring fitted, slide the Ceramic Coupling under the Retaining Ring, paying
attention to the couplings orientation, which should be with the shouldered face uppermost.
4. Once the Ceramic Coupling is in place, check that the Retaining Ring is seated correctly around the
shoulder of the Ceramic Coupling.
5. Clean all
handled parts
with a suitable
solvent and re-fit
the Inlet Flange
to the chamber
using a new
copper gasket, by
firstly sliding the
bypass
connection
through the oven
wall and then
carefully locating
the Ceramic
Coupling over the PVD ion-source of the quadrupole.
6. Re-fit and tighten the eight M8 bolts to secure the Inlet Flange to the chamber.
7. Re-connect the bypass line and tighten up the connectors.
8. Re-start the Cirrus and perform a leak check before re-fitting the oven lid and outer cover.
