Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
17
4.2 The rear panel
The rear panel
incorporates all of
the external
connections
required by the
Cirrus, as well as
exhaust purge
connections.
The diagram
above illustrates a
standard
configuration. On
externally backed
systems, ancillary
connections are
present.
A description of
each of the
connectors can
be found below.
The signal and data ports must not be connected to ports that could become hazardous
live.
