Cirrus SP101013.111 – 10 October 2012
MKS Instruments UK Ltd., Spectra Products
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2. Introduction
The Cirrus is a bench top, on-line gas analysis system designed specifically to analyze gases at
atmospheric pressure.
Key to its analytical performance, the Cirrus is built around a Microvision plus IP Residual Gas Analyzer.
This RGA is housed in a small stainless steel chamber which is pumped by a turbo molecular pump,
which is in turn backed by a dry diaphragm pump.
The vacuum chamber is housed in an oven to assist with pumping when required.
A capillary inlet is used in order to achieve a suitable pressure differential between the atmospheric
sample and the RGA itself. This flexible inlet can be seen to protrude from the Cirrus cabinet. The
same diaphragm pump that backs the turbo pump also serves as a by-pass pump for the capillary inlet.
Because the Cirrus is based around the Microvision IP RGA, the unit operates with the same ‘Process
Eye’ software as the Microvision (with some minor additions). As such either a PC or laptop running
Windows 2000, XP or Vista is required for operation. Connection to the PC is via a Cat5 Ethernet
screened (STP) cable. This computer and interfacing requirement must be considered when specifying
your system.
This manual is written to accompany the Cirrus system. If you have any doubts as to whether this is
the correct manual for your system, please examine the serial number of your system, it should begin
with LM99-xxxxx. You should refer to the ‘Process Eye Professional’ manual for a detailed description
of the software.
Please ensure you read the Maintenance sections of this manual, they contain important
information on the service schedules required for this type of instrument.
