4-12
Positional Deviation Measurement
4
Angle detection
You can detect the angle of an object by selecting 1P-SCH (1-point search) in the POSI-DEVIATION
item (measurement 0 to 4) .
(1) Angle detection by object shape
There are some objects whose angle cannot be detected, due to the shape of the object and the
compression level used for the gray scale search, as shown in the table below.
- The information given above is true when the measurement conditions are as follows: the size of
the reference image to be registered is approximately 64 X 64, and the search size is approximately
100 X 100.
(2) Setting method
On the [MEAS CND] screen, select the "1P-SCH" or "1P-SCH+1P-EDGE" mode on the "
MODE"
and then select the "
DTECT ANGL" item.
See page 4-2.
1. Select the "1P-SCH" or "1P-SCH+1P-EDGE" mode on the "
MODE".
2. Select the angle search range (
±
15˚,
±
30˚,
±
45˚,
±
360˚) on the "
DTECT ANGL" item. The larger
the angle search range, the slower the processing will be.
3. Select a rotation step size in degrees in "
ANGLE UNIT," using the up and down keys. The
relationship between the detection range (unit) of the rotation angle and the reference images to
be created is shown below:
×
△
○
Angle detection
The angle cannot be detected.
The angle can be detected using a
compression level of 2 for the gray
scale search.
The angle can be detected.
Object shape
Difficulty level
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5
1
±
1
7
1
+
,
6
1
+
,
5
1
+
,
4
1
+
•
•
•
•
•
•
•
•
,
4
1
-
,
5
1
-
,
6
1
-
,
7
1
-
5
3
3
1
2
+
,
8
1
+
,
5
1
+
,
2
1
+
•
•
•
•
•
•
•
•
,
2
1
-
,
5
1
-
,
8
1
-
,
1
2
-
5
1
5
5
2
+
,
0
2
+
,
5
1
+
,
0
1
+
,
5
+
,
0
,
5
-
,
0
1
-
,
5
1
-
,
0
2
-
,
5
2
-
1
1
0
1
5
1
+
,
0
1
+
,
0
,
0
1
-
,
5
1
-
5
To the next page
NO
±15°
±30°
±45°
360°
REGISTER NO.
15
14
13
12
11
10
09
08
07
06
05
04
03
02
01
00
×
S
× × × × × ×
× × × × × × × ×
STANDARD
HIGH
NO
1P-SCH
2P-SCH
1P-EDGE
2P-EDGE
1P-SCH+1P-EDGE
F C1 BRT
MEAS CND
SCREEN
COND
SAVE
SET=SELECT A MENU FOR ESC=BACK SEL=CHNG IMG TRG=FUNC
1
DTECT PRECISION STANDARD
2
REGISTER NO.
0(0
〜
7)
3
MODE
1P-SCH
4
DTECT ANGL
NO
5
ANGLE UNIT
6
MDL 0
7
MDL 1
1
2
3
Note: When the rotation angle detection is set other
than "NO," the "HIGH PRECISION" selection
will be invalid. (The detection precision is fixed
to the "STANDARD.")
