Page 20 of 27
D07
-
[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d]
[f,f]
–
Inlet and Outlet Fittings
-[AA ]
Compression Fitting
φ
3mm
-[GG]
Compression Fitting
φ
6mm
-[DD]
Compression Fitting
φ
8mm
-[BB ]
Compression Fitting 1/8"
-[CC ]
Compression Fitting 1/4"
-[MM] VCR 1/4"
-[TT ]
ф
4(inner)
×
1hose
-[RR]
ф
6(inner)
×
1hose
-[XX ]
Customer Special fittings (please consult [d] for detail)
[s]
–
Seal Materials
-[ V ] Viton
-[ N ] Neoprene
[m]
–
Mounting Position
-[ H ] Horizontal
-[ E ] HESD(Horizontal Edge Side Down)
-[ U ] Vertical Inlet Up
-[ D ] Vertical Inlet Down
[d]
–
Description
-[ ] Default Value
：
The letters on cover and tag
：
in Chinese
Differential Pressure
：
D07-7C
：
(0.1 ~ 0.5) MPa (14.5~72.5 psid)
D07-7CM
：
<0.01MPa (1.5psid)
Max Operating Pressure
：
3 MPa (435.1 psig)
Calibration Temperature
：
(22±2)
℃
-[ S ] Customer Special Requirements
：
For Example
：
The letters on cover and tag
：
in English
；
Customer Special Full Scale:9SLM
；
The proportion
of Mixture gases should be indicated
：
N
2
(60%) + CO
2
(40%)
；
Customer Differential
Pressure
：
(0.05 ~ 0.3) MPa
；
Customer Calibration Temperature
：
40
℃
and other customer
special requirements.
Summary of Contents for D07-7C / ZM
Page 1: ...D07 7C D07 7CM 2015 12...
Page 3: ...1 26 1 D07 2 Mass Flow Meter MFM Mass Flow Controller MFC CVD D07 D07 D08 1...
Page 4: ...2 26 1...
Page 7: ...5 26 2 7C 7CM 7C 4 2 D08 3 3 D D D...
Page 9: ...7 26 0 5 V 5 5 1 7C 7CM 4 5 4 D07 7C MFC...
Page 13: ...11 26 5 4 a 9 0V 5V 0 A D 5 00V MFC 3mA 0V 5 00V 3 3K 5 00V D A 100K 10 9 A D D A 15V 15V PLC...
Page 15: ...13 26 D08 6 D08 6 1 6 1 1 12 a 20 5 15 5 5 b 2 c 11 7C 7CM...
Page 16: ...14 26 d e 12 6 1 2 MFC 6 1 3 1 9 6 1 4 1 10...
Page 18: ...16 26 2 7 3 2 F S 2 7 4 7 5 7 6...
Page 19: ...17 26 7 7 N2 10 1 100 SCCM N2 MFC 86 SCCM 10 1 0 719 86 0 719 61 8 SCCM 10 2...
Page 24: ...22 26 3 5 5 1 5 2 5 3 6 6 1 6 2 6 3 7 7 1 7 2 7 3 8 8 1 8 2 9 9 1 9 2 10 10 1...
Page 30: ...D07 7C ZM Mass Flow Controller D07 7CM ZM Mass Flow Meter INSTRUCTION MANUAL Version Dec 2015...
