
Page 7 of 27
4.
INSTALLATION & CONNECTION
4.1
Receipt and Upacking
The D07-7C mass flow controller are manfactured under clean room conditions, and has been packed acordingly
upon receipt, after receiving the equipment, please carefully check the outer package for any damage incurred
during the transportation. Check that the delivery is complete and no parts are missing. Since the D07-7C can be
ordered in Several configuration, ensure that the scope of supply is corect. If you think there is a problem plase
contact the forwarder at once, with regard to liability.
4.2 Dimension
Dimensions of D07-7C, D07-7CM are showing as following:
Figure 4. Dimension of D07-7C
Summary of Contents for D07-7C / ZM
Page 1: ...D07 7C D07 7CM 2015 12...
Page 3: ...1 26 1 D07 2 Mass Flow Meter MFM Mass Flow Controller MFC CVD D07 D07 D08 1...
Page 4: ...2 26 1...
Page 7: ...5 26 2 7C 7CM 7C 4 2 D08 3 3 D D D...
Page 9: ...7 26 0 5 V 5 5 1 7C 7CM 4 5 4 D07 7C MFC...
Page 13: ...11 26 5 4 a 9 0V 5V 0 A D 5 00V MFC 3mA 0V 5 00V 3 3K 5 00V D A 100K 10 9 A D D A 15V 15V PLC...
Page 15: ...13 26 D08 6 D08 6 1 6 1 1 12 a 20 5 15 5 5 b 2 c 11 7C 7CM...
Page 16: ...14 26 d e 12 6 1 2 MFC 6 1 3 1 9 6 1 4 1 10...
Page 18: ...16 26 2 7 3 2 F S 2 7 4 7 5 7 6...
Page 19: ...17 26 7 7 N2 10 1 100 SCCM N2 MFC 86 SCCM 10 1 0 719 86 0 719 61 8 SCCM 10 2...
Page 24: ...22 26 3 5 5 1 5 2 5 3 6 6 1 6 2 6 3 7 7 1 7 2 7 3 8 8 1 8 2 9 9 1 9 2 10 10 1...
Page 30: ...D07 7C ZM Mass Flow Controller D07 7CM ZM Mass Flow Meter INSTRUCTION MANUAL Version Dec 2015...