SevenStar D07-7C / ZM, Instruction Manual

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Page 2 of 27
2. SPECIFICATION
Table 1.Specifications of D07-7C
No. Item D07-7C
1 Ranges of Flow ( 0~5,10,20,30,50,100,200,300,500) SCCM
( 0~1,2,3,5,10) SLM
2 Accuracy ±1.5 % F.S
3 Linearity ±1 % F.S
4 Repeatability ±0.2 %F.S
5
Response-Time
(0~100%)
Electronic characteristic: 10 sec
Gas characteristic: ≤ 4 sec
6 Operation Pressure (0.1 ~ 0.5) MPa
7 Max Pressure 3 MPa
8 Operation Temperature 5 ~ 45 ℃ ℃
9 Input/Output Signal 0 V ~ +5.00 V(Input resistance value 100K, output current 3mA)
10 Valve N.C.Solenoid
11 Power Supply +15 V 50 mA; -15V 200 mA
12 Dimension
According to Figure 4
13 Weight 1.1 kg
Notes :
MFC/MFM is calibrated by N
2
as a standard gas.
Units: SCCM (Standard cubic centimeter/min);
SLM (Standard liter/min)
Standard situation: Temperature 273.15K (0 ºC); Air pressure 101325 Pa (760mm Hg)
For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of
SLM is identical to “L/min, 0 ºC ,1atm”.
F.S: Full Scale