SevenStar D07-7C / ZM, Instruction Manual

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Page 3 of 27
Table 2. Specification of D07-7CM Mass Flow Meter
NO. Item D07-7CM
1 Ranges of Flow ( 0~5,10,20,30,50,100,200,300,500) SCCM
( 0~1,2,3,5,10) SLM
2 Accuracy ±1.5 % F.S
3 linearity ±1 % F.S
4 Repeatability ±0.2 %F.S
5 Response-Time 10 sec
6 Differential pressure <0.01 MPa
7 Max pressure 3 MPa
8 Operation temperature 5
º
C ~ 45
º
C
9 Setting/output signal
0 V ~ +5.00 V
(input resistance value 100K, output current 3mA)
10 Power supply
+15 V 50 mA
-15 V 50 mA
11 Dimensions
According to Figure 5
12 Weight 0.92 kg
The main specifications of D07 series could be found in table 1 and table 2. D07-7CM is the measuring part of
D07-7C.