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PDS 2010 LABCOTER™ 2

Parylene Deposition System

Operator’s Manual

System Serial Number: ________________

Prepared for: ________________________

Make certain that everyone associated with this instrument

becomes knowledgeable about the material contained in this manual

before using the equipment.

7645 Woodland Drive, Indianapolis, IN 46278-2707

Customer Service:

317. 244.1200

317.240.2073

[email protected]

COPYRIGHT SPECIALTY COATING SYSTEMS

Summary of Contents for LABCOTER 2

Page 1: ...__________ Make certain that everyone associated with this instrument becomes knowledgeable about the material contained in this manual before using the equipment 7645 Woodland Drive Indianapolis IN 4...

Page 2: ...Rev 37 Operator s Manual OM 610 1002 1 7645 WOODLAND DRIVE INDIANAPOLIS IN 46278 2707 PH 800 356 8260 VOLTS AMPS PHASE HZ INT CAPACITY AMP MFG DATE SCHEMATICS MODEL NO SERIAL NO...

Page 3: ...OM 610 1002 1 Operator s Manual Rev 37...

Page 4: ...Rev 37 Operator s Manual OM 610 1002 1...

Page 5: ...ERVICES PROVIDED BY THE CUSTOMER 9 4 3 SHIPPING DAMAGE 9 4 4 UNPACKING 9 4 5 EQUIPMENT PLACEMENT 10 4 6 INSPECTION 10 4 7 ELECTRICAL POWER INSTALLATION 10 4 8 CHILLER OPTION 11 4 9 LIQUID NITROGEN OPT...

Page 6: ...End Of Run 31 5 12 SUCCESSIVE RUNS 32 5 13 SEMI AUTOMATIC OPERATION 32 5 14 OPERATING CONSIDERATIONS 33 5 14 1 Deposition Rate 33 5 14 2 Amount of Substrate 33 5 14 3 Type of Substrate 33 5 14 4 Orie...

Page 7: ...1 FACILITIES DRAWING 61 AD 610 1010 1 120V ASSEMBLY 63 AD 610 1011 1 220V ASSEMBLY 65 AD 610 1065 1 200 VOLT ASSEMBLY 67 AD 286 1041 1 BASIC FRAME ASSEMBLY 1 OF 2 69 AD 286 1041 1 BASIC FRAME ASSEMBL...

Page 8: ...01 2 CE ELECTRICAL SCHEMATIC 2 OF 2 125 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 1 OF 3 127 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 2 OF 3 129 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 3 OF 3...

Page 9: ...fforts are also continuously made to include CE compliant components wherever possible 1 1 GENERAL INFORMATION The following warning symbols are used through out this manual HOT SURFACE ELECTRICAL SHO...

Page 10: ...periods of unattended operation Follow normal industrial safety practices with respect to 100 220 volts AC and moving parts Use of this machine for anything but its intended purpose may create a safe...

Page 11: ...ating element or the sensor itself when they are hot 1 5 INLET BAFFLE Wear protective gloves when removing the inlet baffle from the deposition chamber after a coating run This baffle may become heate...

Page 12: ...er no circumstances should the water temperature be over 44 C 112 F nor should the frozen part be rubbed either before or after re warming The patient should not smoke or drink alcohol Keep warm and a...

Page 13: ...automatic operation the system pumps down to a preset pressure while the furnace and chamber gauge cycle up to their operation temperature When all temperatures and pressures are within their set ope...

Page 14: ...Rev 37 Operator s Manual OM 610 1002 1 page 6 SECTION 2 OVERVIEW PDS 2010...

Page 15: ...10 220 VAC single phase 50 60 Hz 20 12 A Specified at time of purchase Dimer Capacity 125 grams Vacuum Pump 8 5 CFM two stage direct drive Exhaust Approx 8 5 CFM 0 1 Inch Water 14 5 M3 H Cold Trap Opt...

Page 16: ...Rev 37 Operator s Manual OM 610 1002 1 page 8 SECTION 3 EQUIPMENT SPECIFICATION PDS 2010 Figure 2 Useable Chamber Size Figure 1 Facilities Drawing...

Page 17: ...f an SCS Installation Start up service call is scheduled the customer s installation must be completed before the arrival of the SCS service technician The customer is requested to give a minimum one...

Page 18: ...iation in a work area which is not provided with adequate ventilation The work area ventilation must provide for a normal atmosphere in the work area The PDS 2010 is not designed for use in a clean ro...

Page 19: ...r uses a special chamber with a removable lid Reference drawing AD 285 1161 in Section 7 Remove the side panels from the PDS 2010 Remove the lid from the chamber and set it aside Remove the viewport f...

Page 20: ...n and systematically verify proper operation of all functions Verify proper operation of Emergency Stop pushbutton After the system is fully functional perform the initial product processing assistanc...

Page 21: ...ts one atmosphere equals 29 92 inches of mercury inch Hg 760 mm Hg 760 Torr and 1 013 bar The term vacuum units is used frequently in this manual to indicate a pressure reading on the equipment contro...

Page 22: ...ice Medium Vacuum represents pressures between 1 and 1x10 3 Torr absolute This is a transition range between viscous and molecular flow Most pumps serving this range are also mechanical The 2010 perfo...

Page 23: ...low is the flow of gas through an enclosure under conditions such that the mean free path is of the order as the dimensions of the enclosure In this flow regime the flow characteristics are determined...

Page 24: ...l mean the chamber pressure Hot or Cold Base Pressure The chamber pressure sensor simply called gauge tube here is heated during processing so that Parylene does not deposit on it A thermocouple in it...

Page 25: ...pes of Parylene The expected increase of pressure in the deposition chamber during a coating run is controlled at a higher pressure than the other Parylenes Parylene N deposits at a rate of approximat...

Page 26: ...s is responsible for the truly conformal nature of the coating The deposition process consists of the following steps done in the presence of a medium vacuum 1 Vaporization Parylene is vaporized from...

Page 27: ...on chamber past the probe cold trap and then through the vacuum pump which exhausts to the atmosphere 5 3 2 4 Typical Coating Cycle 1 The substrate to be coated is loaded in the deposition chamber and...

Page 28: ...on takes place The monomer will deposit and polymerize on all the ambient temperature surfaces within the deposition chamber this includes the loaded substrate fixturing chamber walls baffles and any...

Page 29: ...controller PhA2 It can also be accomplished by starting the vaporizer heater at a lower set point If initial overshoot is a problem start the lower set point or it can be done manually by starting th...

Page 30: ...s operating range the fault alarm detection sequence will be initiated 5 5 2 Chamber Gauge Temperature Controller The chamber gauge controller displays and controls the temperature of the vacuum gauge...

Page 31: ...ting at the end of a run The output 1 light is always on except when the vaporizer is above its set point value In some applications the initial rise or overshoot in chamber pressure may be unacceptab...

Page 32: ...s Under normal operating conditions it is possible that contamination of the seat of the integral pump isolation valve that will allow air back through the pump into the system Consult the Edwards man...

Page 33: ...t least 20 seconds after the PROCESS START STOP is depressed or after main power is turned on After the furnace monitor is enabled any deviation from the furnace set point as indicated by the furnace...

Page 34: ...to the 2010 A LN2 supply regulated at 20 25 PSIG is recommended for auto control of the LN2 into the cold trap probe The Auto LN2 low level sensor opens the solenoid valve to allow LN2 to flow into t...

Page 35: ...for KBWS Whisper Drive located in the Technical Literature section 2 Disconnect the main power from the PDS 2010 3 The tumbler drive assembly uses a 130VDC motor For the 130VDC motor set Jumper J1 to...

Page 36: ...ting cycles during regular use as warranted by changes in coating quality Determining Base Pressure The following procedure should be used to check the base pressure of an unloaded 2010 system clean d...

Page 37: ...y aluminum foil sheet By shaping the boat so it touches as much of the heater walls as possible the heat transfer is optimized To create a dimer boat 1 Cut a rectangular piece of aluminum foil to 11 i...

Page 38: ...over the base The chamber base split line has some tolerance to allow for easy fit of the chamber onto the base For most coating applications it is desirable to place the chamber as far to the right...

Page 39: ...he vacuum 5 11 5 End Of Run CAUTION The system will maintain vacuum until the PROCESS START STOP button is depressed or the VENT switch is moved to the VENT position 1 Disable chilling of the cold tra...

Page 40: ...the Vaporizer has cooled below 40 C load a new charge of Parylene dimer If you load the vaporizer before it cools the Parylene dimer will begin to vaporize immediately this will lead to pump down prob...

Page 41: ...e Consider the total amount of coating surface area when determining the amount of Parylene dimer needed to achieve a given coating thickness In addition to the substrate the chamber walls baffle and...

Page 42: ...overall efficiency of the 2010 Relatively large leaks can affect the quality of the Parylene coating 5 14 7 Baffle The chamber inlet baffle is extremely important for the even distribution of monomer...

Page 43: ...anate to the 100 ml beaker 3 Agitate the sample by gently swirling the beaker contents for 15 30 seconds DO NOT mix the sample in any other way 4 Observe the color of the sample A good solution will t...

Page 44: ......

Page 45: ...the Parylene film itself but only to the bare uncoated surfaces that will receive a coating during the first deposition cycle after cleaning 6 1 2 Parylene Coating Removal The following items should b...

Page 46: ...ealing surfaces and O rings The contamination in most cases has been found to be small particles of trapped polymer It is good operating practice to check the sealing surfaces of the vaporizer access...

Page 47: ...deposit will be found in the pyrolysis tube This deposit will be most prevalent near the inlet port of the chamber base Typically this deposit will need to be removed after a dimer throughput of 300...

Page 48: ...acer with solvent 8 Liberally coat the shaft and housing bore in the marked A with APIEZON K vacuum oil 9 Coat the new O rings and spacer with APIEZON K vacuum oil and install in the housing 10 Press...

Page 49: ...the feed thru and install a new O ring on the feed thru Reinstall in the chamber in the reverse order of removal 6 3 PROCESS TEMPERATURE CONTROLLERS The WEST process controllers used on the 2010 cont...

Page 50: ...ont door Verification is complete 6 3 2 Vacuum Controller The 2010 chamber pressure is monitored and controlled by a combination of three 3 components Pirani type pressure transducer housed within the...

Page 51: ...ng 1 Remove all power to the machine 2 Remove the cabinet side panels 3 Replace the lead wires at terminals 4 and 5 of the controller with leads from a qualified variable voltage source capable of 0 1...

Page 52: ...isplay Turning the potentiometer clockwise will raise the displayed value and turning it counterclockwise will lower it 7 The zero adjust calibration is now complete Turn off the Main Power reconnect...

Page 53: ...lower display will show Uloc 4 Use the Raise key to increment the PV value until the controller shows the proper Unlock code the default code is 20 and then depress the Function key The display will...

Page 54: ...crement the PV value until the upper display shows the proper Unlock code the default code is 10 and then depress the Function key The MAN light will come on and display the first parameter in the Set...

Page 55: ...C 0_10 ruL 761 761 761 1112 rLL 0 0 0 4 dPoS 0 CtyP SnGL SnGL SnGL SnGL CtrL rEv rEv rEv rEv ALA 1 bAnd bAnd P_Hi P_Lo bAL 1 PhA 1 PLA 1 AHY 1 1 1 1 1 ALA 2 nonE nonE P_Hi nonE PhA 2 AHY 2 1 LAEn diSA...

Page 56: ...ad only read only read only read only Pb_P 1 0 1 0 5 0 0 5 ArST 2 37 0 41 2 00 3 00 rAtE 0 39 0 10 0 30 1 40 biAS 25 25 25 25 SPuL 720 140 180 100 SPLL 0 0 0 4 OPuL 100 100 100 100 Ct 1 32 32 32 32 bA...

Page 57: ...Control Action REv reverse acting ALA 1 Alarm 1 Type P_Hi PhA 1 Process High Alarm 1 value Range Max PLA 1 Process Low Alarm 1 value Range Min bAL 1 Band Alarm 1 value 5 AHY 1 Alarm 1 Hysteresis 1 ALA...

Page 58: ...r Limit 100 Ct 1 Output 1 Cycle Time 32 sec bAL 1 Band Alarm 1 value 5 PhA 1 High Alarm 1 value Max Range PLA 1 Low Alarm 1 value Min Range AHY 1 Alarm 1 Hysteresis 1 PhA 2 High Alarm 2 value Max Rang...

Page 59: ...ay be adjusted to be within input span from set point biAS Bias Manual Reset This bias to the output power is expressed as a percentage of output power and is adjustable in the range 0 to 100 This par...

Page 60: ...uration Mode LAEn Loop Alarm This is a controller parameter it is the means by which the user can enable or disable the loop alarm The loop alarm is a special alarm that detects faults in the control...

Page 61: ...e in engineering units It defines the displayed value when the process variable input is at its minimum value It is adjustable between 1999 to 9999 and can be set to a value more than but not within 1...

Page 62: ...alue that avoids causing damage to the process being controlled The Set Point Low Limit may be adjusted between the Input Range Minimum and the current set point value SPr Set Point Ramp This paramete...

Page 63: ...Using and following the recommendations in these logs will maximize trouble free operation of the PDS 2010 coating process DAILY OPERATION LOG Date Film Thick ness Load Size Sq Inches Dimer Usage Base...

Page 64: ...ter Solution Pliers Single Edge Razor Blades Hi Temperature O Ring Grease Tweezers Screwdrivers Non Flammable Solvent Flash Light SA 285 1119 1 2010 Rotary Feed Thru Rebuild Kit SA 285 1216 1 2010 Cle...

Page 65: ...ple If temperature overshoots increase Vaporizer Pb1 by 10 Uneven coating distributions in the chamber Parts not uniformly loaded in the chamber Chamber baffle warped clogged or loose fitting Fixture...

Page 66: ...Rev 37 Operator s Manual OM 610 1002 1 page 58 SECTION 6 MAINTENANCE PDS 2010...

Page 67: ...number The following Assemblies are included ITEM ASSEMBLY FACILITIES DRAWING FD 610 1007 1 ASSEMBLY 120 Volt 60 Hz AD 610 1010 1 ASSEMBLY 220 Volt 50 Hz AD 610 1011 1 ASSEMBLY 200 Volt w o Pump AD 6...

Page 68: ...Rev 37 Operator s Manual OM 610 1002 1 page 60 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 69: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 61 FD 610 1007 1 FACILITIES DRAWING...

Page 70: ...Rev 37 Operator s Manual OM 610 1002 1 page 62 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 71: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 63 AD 610 1010 1 120V ASSEMBLY...

Page 72: ...Rev 37 Operator s Manual OM 610 1002 1 page 64 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 73: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 65 AD 610 1011 1 220V ASSEMBLY...

Page 74: ...Rev 37 Operator s Manual OM 610 1002 1 page 66 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 75: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 67 AD 610 1065 1 200 VOLT ASSEMBLY...

Page 76: ...Rev 37 Operator s Manual OM 610 1002 1 page 68 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 77: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 69 AD 286 1041 1 BASIC FRAME ASSEMBLY 1 OF 2...

Page 78: ...Rev 37 Operator s Manual OM 610 1002 1 page 70 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 79: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 71 AD 286 1041 1 BASIC FRAME ASSEMBLY 2 OF 2...

Page 80: ...Rev 37 Operator s Manual OM 610 1002 1 page 72 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 81: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 73 AD 610 1001 4 ELECTRICAL PANEL ASSEMBLY...

Page 82: ...Rev 37 Operator s Manual OM 610 1002 1 page 74 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 83: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 75 AD 215 1007 1 LOAD DOOR ASSEMBLY...

Page 84: ...Rev 37 Operator s Manual OM 610 1002 1 page 76 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 85: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 77 AD 374 1029 2 HEATER ASSEMBLY...

Page 86: ...Rev 37 Operator s Manual OM 610 1002 1 page 78 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 87: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 79 AD 241 1007 1 FIXTURE ROTATION ASSEMBLY...

Page 88: ...Rev 37 Operator s Manual OM 610 1002 1 page 80 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 89: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 81 AD 157 1019 1 LN2 CHILLER ASSEMBLY 1 OF 2...

Page 90: ...Rev 37 Operator s Manual OM 610 1002 1 page 82 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 91: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 83 AD 157 1019 1 LN2 CHILLER ASSEMBLY 2 OF 2...

Page 92: ...Rev 37 Operator s Manual OM 610 1002 1 page 84 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 93: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 85 AD 724 1097 1 LN2 LEVEL CONTROLLER ASSEMBLY...

Page 94: ...Rev 37 Operator s Manual OM 610 1002 1 page 86 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 95: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 87 AD 241 1008 1 STANDARD FIXTURE...

Page 96: ...Rev 37 Operator s Manual OM 610 1002 1 page 88 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 97: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 89 D50016 VACUUM CHAMBER...

Page 98: ...Rev 37 Operator s Manual OM 610 1002 1 page 90 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 99: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 91 AD 088 1031 1 CHAMBER WITH VIEWPORT LID...

Page 100: ...Rev 37 Operator s Manual OM 610 1002 1 page 92 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 101: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 93 FP 088 1081 1 REDUCED DOME CHAMBER...

Page 102: ...Rev 37 Operator s Manual OM 610 1002 1 page 94 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 103: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 95 AD 285 1161 1 TUMBLE KIT 1 OF 3...

Page 104: ...Rev 37 Operator s Manual OM 610 1002 1 page 96 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 105: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 97 AD 285 1161 1 TUMBLE KIT 2 OF 3...

Page 106: ...Rev 37 Operator s Manual OM 610 1002 1 page 98 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 107: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 99 AD 285 1161 1 TUMBLE KIT 3 OF 3...

Page 108: ...Rev 37 Operator s Manual OM 610 1002 1 page 100 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 109: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 101 AD 285 1055 1 TUMBLE ADAPTOR 1 OF 2...

Page 110: ...Rev 37 Operator s Manual OM 610 1002 1 page 102 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 111: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 103 AD 285 1055 1 TUMBLE ADAPTOR 2 OF 2...

Page 112: ...Rev 37 Operator s Manual OM 610 1002 1 page 104 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 113: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 105 AD 241 1185 1 FIXTURE 3...

Page 114: ...Rev 37 Operator s Manual OM 610 1002 1 page 106 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 115: ...OM 610 1002 1 Operator s Manual Rev 37 PDS 2010 SECTION 7 COMPONENT LOCATION page 107 AD 684 1005 1 TUMBLER BASKET OPTION...

Page 116: ...Rev 37 Operator s Manual OM 610 1002 1 page 108 SECTION 7 COMPONENT LOCATION PDS 2010...

Page 117: ...12 BUNA N LG12B LESKER 20079 1 EA CENTERING RING W SCRN QF25 SRV SM LESKER 20080 2 EA O RING VITON SZ 231 2 231 V884 75 PARKER 20081 1 EA O RING SILICONE 2 234 S604 70 20084 2 EA O RING SZ 240 NITRILE...

Page 118: ...EA RELAY SSR 25A 3 32VDC C G RM1A23D25 20195 1 EA BRIDGE AMP W CABLE 275239 G P 20052 1 EA HEATER BAND 240V 500W STB1J3A2 A12 WAT 20056 1 EA HEATER 150W RING A 00 135247 CHROMOLOX 20058 1 EA FAN AXIA...

Page 119: ...need venting cooling etc skip the unneeded step STEP OPERATOR ACTION PDS 2010 ACTIONS 1 Power on the PDS 2010 with the MAIN POWER ON button The process controllers will be on when main power is on Th...

Page 120: ...CHAMBER With a spray bottle and a lint free cloth apply a 2 solution of Micro Soap and water release agent to all the bare stainless steel surfaces from where the Parylene coating must later be strip...

Page 121: ...es not drip or fall into the Cold Trap and eventually cause damage Allow 10 minutes for the flex line and its junction to the probe to warm before moving do not wait so long that the frozen material o...

Page 122: ...efore pumping down 3b LN2 OPTION Ref Section 5 8 2 NOTE Do not enable the LN2 at this time See step 8 4 Depress PROCESS START STOP After depressing this pushbutton the button will be illuminated green...

Page 123: ...ad Door and Dimer Boat to cool before handling them and wear protective gloves when removing the Dimer Boat Load the measured amount of Dimer in a Dimer Boat Close the LOAD DOOR 8 Switch the VACUUM se...

Page 124: ...ization of the dimer before proceeding to step 12 12 After base pressure has been achieved again a 5 minute Bake Out timer is enabled This ensures all parylene dimer gets vaporized 13 Press the PROCES...

Page 125: ...cifically limited to protective coatings thermocouples heaters seals o rings drive belts relays lamps and bearings but not including filters to a period of ninety 90 days from the date of shipment Tes...

Page 126: ...plying of this equipment or its use whether based on warranty contract or negligence shall not in any case exceed the cost of correcting defects in the equipment as herein provided and upon expiration...

Page 127: ...er to open the files It is free and is provided with most pieces of software to read their manuals The disk should start automatically if it does not start begin by opening the file AccessPage PDF Fro...

Page 128: ...Rev 37 Operator s Manual OM 610 1002 1 page 120 SECTION 10 WARRANTY PDS 2010...

Page 129: ...TURE page 121 SECTION 12 ELECTRICAL SCHEMATICS The following Electrical Schematics are included in this manual CE Electrical Schematic ES 610 1001 2 Domestic Electrical Schematic ES 610 1001 3 220V El...

Page 130: ...Rev 37 Operator s Manual OM 610 1002 1 page 122 SECTION 10 WARRANTY PDS 2010...

Page 131: ...PDS 2010 SCHEMATICS page 123 ES 610 1001 2 CE ELECTRICAL SCHEMATIC 1 OF 2...

Page 132: ...page 124 SCHEMATICS PDS 2010...

Page 133: ...PDS 2010 SCHEMATICS page 125 ES 610 1001 2 CE ELECTRICAL SCHEMATIC 2 OF 2...

Page 134: ...page 126 SCHEMATICS PDS 2010...

Page 135: ...PDS 2010 SCHEMATICS page 127 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 1 OF 3...

Page 136: ...page 128 SCHEMATICS PDS 2010...

Page 137: ...PDS 2010 SCHEMATICS page 129 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 2 OF 3...

Page 138: ...page 130 SCHEMATICS PDS 2010...

Page 139: ...PDS 2010 SCHEMATICS page 131 ES 610 1068 1 DOMESTIC ELECTRICAL SCHEMATIC 3 OF 3...

Page 140: ...page 132 SCHEMATICS PDS 2010...

Page 141: ...PDS 2010 SCHEMATICS page 133 ES 610 1001 5 220V ELECTRICAL SCHEMATIC 1 OF 3...

Page 142: ...page 134 SCHEMATICS PDS 2010...

Page 143: ...PDS 2010 SCHEMATICS page 135 ES 610 1001 5 220V ELECTRICAL SCHEMATIC 2 OF 3...

Page 144: ...page 136 SCHEMATICS PDS 2010...

Page 145: ...PDS 2010 SCHEMATICS page 137 ES 610 1001 5 220V ELECTRICAL SCHEMATIC 3 OF 3...

Page 146: ...page 138 SCHEMATICS PDS 2010...

Page 147: ...PDS 2010 SCHEMATICS page 139 ES 610 1065 1 200V ELECTRICAL SCHEMATIC 1 OF 3...

Page 148: ...page 140 SCHEMATICS PDS 2010...

Page 149: ...PDS 2010 SCHEMATICS page 141 ES 610 1065 1 200V ELECTRICAL SCHEMATIC 2 OF 3...

Page 150: ...page 142 SCHEMATICS PDS 2010...

Page 151: ...PDS 2010 SCHEMATICS page 143 ES 610 1065 1 200V ELECTRICAL SCHEMATIC 3 OF 3...

Page 152: ...page 144 SCHEMATICS PDS 2010...

Page 153: ...items Alarm Codes 23 AP Wet Promotion 35 Base Pressure 16 28 Cold Trap Probe 31 38 Deposition Rate 33 Environment 7 Icon Warning 1 Micro Soap 37 milliTorr 13 MSDS 2 Nitrogen 4 11 26 Operating Environm...

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