Document No.: 1P0446-1 Rev. B, April 7, 2014
21
1.
TIMER
–
Will start once you release your finger from the RF ON switch. Displays a range of 6
seconds to 999.9 minutes.
2.
AC ON
–
The AC power switch is a push-button lamp switch, which is illuminated when the main
power is on.
3.
VACUUM
–
The vacuum switch is a push-button lamp switch, which is illuminated when the
chamber is under vacuum. In the ON position, the vacuum port is activated and the vent valve is
closed. When the switch is off, the vacuum port is off and the vent valve is open; thus venting the
chamber to atmospheric pressure.
4.
PROCESS START
–
This switch will start the process by delivering RF power and gas to the
chamber. This switch will also activate the TIMER when the RF comes on. The plasma will strike at
the crossover pressure of .35 Torr (350 mT).
5.
PROCESS ABORT
—
Stops the process and turns off the RF and Gas supply. This button will also
clear the timer and performs a system reset.
6.
Switch-selected Display
–
Displays the chamber PRESSURE in torr (starting at the bottom--first
position), POWER INPUT in watts (second position), REFLECTED POWER in watts (third position) and
FORWARD POWER going into the chamber in watts (fourth position).
7.
Chamber Door
—
This hinged door will allow access to the vacuum chamber. The dynamic hinge
allows the chamber door to be drawn in with equal force along the entire surface upon pump down.
This increases vacuum integrity in the chamber.
8.
Viewport window
—
This window allows the user to view their samples and the plasma during
processing. The window is made of a proprietary polymer for UV protection.
9.
Gas Flow
—
Flowmeters provide a relative measure of process gas flowing into the chamber and
provides a way to meter flow into the chamber. The ball in the flowmeter does not have to rise for
gas to flow into the chamber. A rise in chamber pressure is an indication of gas flow.
The LED Diagnostic Lights (10 thru 14) will give the user a visual output of the various IoN 3 MHz
functions and confirm that the various modules are functioning correctly.
10.
Interlocks LED
—
there are three interlocks on the IoN 3 MHz (Chamber Door, Left Panel, and
Back-Left Panel). If any of the interlocks are not engaged, the system will not allow the RF to
activate; thus not allowing any process to be run. When all three of the interlocks are engaged, the
INTERLOCKS LED will be illuminated (if AC ON is activated).
11.
Vacuum LED
—
after the AC ON has been activated the VACUUM LED will illuminate when the
VACUUM button has been depressed. This tells the user that the vacuum valve has opened allowing
the vacuum pump to pull a vacuum on the system
—
the chamber will start to pump down to a lower
pressure. The vent valve is a normally open valve for safety reasons. If your facility power is lost, the
system will automatically vent the chamber.
12.
Pressure LED
—
this LED will illuminate when you depress the PROCESS START button and will
stay illuminated for 25 seconds. This lets you know that the system is ready and waiting for the cross-
over pressure to reach 1 Torr.
13.
Gas Flow LED
--this LED will illuminate when the all conditions have been met (AC ON has been
depressed, VACUUM has been depressed, the PROCESS START has been depressed and the system
has reached a vacuum pressure of at least 1 Torr. This LED tells the user that the gas flow solenoid
valve has opened and gas will now flow into the VACUUM chamber.
14.
RF On LED
—
When this LED is illuminated the RF generator is applying power to the chamber.
For this light to illuminate, several preconditions must be met. The AC ON has been depressed,