Document No.: 1P0446-1 Rev. B, April 7, 2014
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LOCATING VACUUM LEAKS
The procedure outlined below is for locating and fixing vacuum leaks. A leak may be present if the
system will not pump down. The IoN 3 MHz system is designed for use with room air, so minor leaks
should not create processing issues.
1.
Check to see if the O-ring on the inside of the chamber door is in good condition and is seated
properly. Replace the O-ring if necessary.
2.
Check the Viewport window gasket to see if it is in good condition and is sealing properly.
3.
Tighten all external fittings on the IoN 3 MHz if they have been added.
4.
Check vent valve.
It is possible to locate a very small leak by squirting all external fittings and sealing ports, one at a
time, with IPA (alcohol). When IPA is sprayed over the connection that is leaking, the chamber
pressure should rise slightly as the alcohol vapor is sucked into the chamber. Leaks can be repaired
by replacing o-rings, chamber seals, hoses, fittings, and by replacing Teflon tape at various joints.
TROUBLESHOOTING GUIDE
1.
Panel lights do not illuminate when reactor chamber module AC switch is depressed.
x
Are system power cords connected to power outlet?
x
Is the breaker on the back of the system in the on or up position?
2.
Chamber will not evacuate when VACUUM switch is depressed and illuminated:
x
Is vacuum pump operating?
x
Can you hear the vacuum pump?
3.
System will not pump-down to minimum base pressure (below .30 Torr)
x
Is the
chamber door “o” ring
dirty? If so, clean
the chamber door “o” ring. Replace “o” ring
if
damaged.
x
Is chamber door property positioned and sealed?
x
Will system pump-down with process gas turned off? If so, leak is located in gas supply line.
Leaks can be located using procedure detailed earlier in this section.
x
Is vacuum line free of restrictions or kinks? You may need to open the back pump panel to
inspect the pump lines.
x
Is vacuum pump operating correctly? Is oil clean and at correct level?
x
Have leaks developed in any of the internal or external gas or vacuum lines and/or fittings?
x
Have the vacuum pump or vent valves failed?
4.
The IoN 3 MHz will not bleed back to atmosphere when VACUUM switch is released and lamp
extinguishes:
x
Has the vent valve failed?
5.
The IoN 3 MHz chamber appears contaminated upon completion of processing:
x
Is material being processed out gassing? After cleaning chamber (as detailed earlier) run
process without material in chamber to see if contamination still occurs.
x
Are process gas lines contaminated or corroded internally?
x
Is pressure sensor line contaminated or corroded internally?