Document No.: 1P0446-1 Rev. B, April 7, 2014
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Section 7 -
Operation Procedures
This section describes the procedures required for operation of the IoN 3 MHz system.
Basic operation of the IoN 3 MHz consists of loading the object to be processed, evacuating the
reaction chamber, introducing the process gas, and applying the RF power to induce a plasma. The
RF generator output impedance is automatically matched to the chamber impedance for the best
power transfer. Upon completion of the process, the RF power is stopped, the process gas flow is
turned off, the vacuum valve is closed, and the chamber bleeds back to atmospheric pressure.
7.1
Standard Operating Procedure
1.
Push AC ON.
2.
Put your sample on the sample holder in chamber.
3.
Push VACUUM after holding the chamber door closed (a magnet will help hold the door closed)
4.
Wait for the door to be held closed by the chamber vacuum suction.
5.
Set timer for the desired process time.
6.
Press PROCESS START button
—
the light on this button will illuminate when conditions allow the
RF to turn on, and the process gas is allowed into the chamber (when the pressure reaches .35 Torr
–
the crossover pressure).
7.
You will see a glow discharge through the view port window.
8.
Adjust the FLOWMETER to allow gas into the chamber.
9.
Adjust the FLOWMETER to set the PRESSURE to the reading you desire (the system is designed to
operate from .5 to 1.2 Torr).
10.
Timer will shut off the RF power and gas flow, and end the plasma process.
11.
Conclusion. An internal valve will shut off the gas flow into the chamber when the process is
timed out, ended or aborted.
12.
Press the VACUUM button to vent the chamber.
13.
After the chamber vents to atmosphere, the chamber door can be opened (the door is held in
place by a magnet).
14.
Open chamber door completely and remove your sample off the sample carrier (you may need to
use protective gloves). For long duration processes, be careful of hot parts.
15.
After processing leave the system on for a few minutes to allow the fans to cool the system. Then
if desired, you may turn off the system by depressing the AC ON button.
TUNING
An audible alarm will sound if the reflected power is too high.
The factory presets the impedance
matching network. Please refer any service to PVA TePla America personnel. No adjustment should
be required.
