Document No.: 1P0446-1 Rev. B, April 7, 2014
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RADIO FREQUENCY RF EXPOSURE
A hazard from RF exposure exists if the system is operated without the door closed and/or the
exterior panel in place. This would require defeating safety interlocks and is not recommended.
RF Radiation Hazard
—
Warns personnel of an RF energy radiation
hazard. The IoN 3 MHz unit uses an RF generator, which produces RF
energy at levels that may cause burns. Improper connections or
operations without protective covering may result in RF radiation
exceeding safety standards. This label is located on or next to the load
door, left and right covers.
CHAMBER PROXIMITY
The plasma chamber can become quite hot during some processes. Exercise caution to prevent
burns.
Thermal Hazard
—
Warns personnel of hot surfaces inside the
machine that may cause burns if touched. It should be on or next to
the load door.
UV Warning
—
Warns personnel that looking into the UV light may be
hazardous. The IoN 3 MHz has UV shielding on the outside of the
viewport window. This warning label is located on or next to the load
door.
CHEMICAL HAZARD
The pump oil can be a skin and eye irritant. Gloves and eye protection should be used when changing
or adding pump oil.
Wear Protective Gloves
—
Warns personnel that hazards exist that
require them to wear protective gloves. It should be on or next to the
load door.
PROCESS GASES
The IoN 3 MHz was designed for use with inert gas, oxygen, argon, SF6 and CF
4
.
Certain process gases that the operator may select for use with this equipment may be hazardous.
Some may require special precautions. These precautions vary depending on the gas. Consult with