FocusMonitor FM+
35,0(6
19
Revision 03/2019 EN
1. Connect the FocusMonitor FM+ with the LaserDiagnosticsSoftware LDS as described in chapter 11.3 on
2. Choose the function of the FocusMonitor FM+ as described in chapter 11.4.1 on page 29.
3. In accordance with chapter 11.4.3 on page 31, enter the value of 60 mm in the
Device Control >
Advanced > Move axes
menu.
• The horizontal carrier will move to the position 60 mm above its resting position (see Fig. 7.6 on page 18)
without a rotated measuring tip.
4. Place the alignment tool on the measuring head.
5. Turn on the pilot laser and align the device:
• If the laser beam hits perpendicular to and in the middle of the small marking in the alignment tool, the
device is properly aligned.
Pilot beam
Measuring head
Alignment tool with the
offset specified
Marking
Adjustment tool
FM 120
Offset: 14mm
Fig. 7.7:
Alignment tool at the measuring head of FocusMonitor FM+
y-axis
x-axis
Offset = 14 mm
max. 22 mm
8 x 8 mm
Measuring tip
Fig. 7.8:
Offset of a measurement window size of 8 x 8 mm
NOTICE
Damage/destruction of the alignment tool
The exposure with laser radiation will destroy the alignment tool.
X
Remove the alignment tool before turning on the laser.
Five to twelve seconds after the supply voltage is switched on, the FocusMonitor FM+ moves into
the resting position (lowest z-position).
