Polytec TMS-350 TopMap In.Line Hardware Manual Download Page 1

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Title

Hardware Manual

3D Topography Measurement

System

T M S - 3 5 0 To p M a p I n . L i n e

Interferometer

TMS-I-350

Controller

TMS-E-350

TMS-W-350

Summary of Contents for TMS-350 TopMap In.Line

Page 1: ...Title Hardware Manual 3D Topography Measurement System T M S 3 5 0 To p M a p I n L i n e Interferometer TMS I 350 Controller TMS E 350 PC TMS W 350...

Page 2: ...validated in the case of unauthorized manipulation or modification of the equipment To return the equipment always use the original packaging Otherwise we reserve the right to check the equipment for...

Page 3: ...andards and Directives 1 4 1 3 3 Equipment 1 5 1 4 Electrical Safety 1 6 1 4 1 Important Warning Notices 1 6 1 4 2 Applicable Standards and Directives 1 7 2 Introduction 2 1 2 1 System Overview 2 1 2...

Page 4: ...erometer 5 2 6 Technical Specifications 6 1 6 1 Harmonized Standards Applied 6 1 6 2 TMS E 350 Controller 6 1 6 3 TMS I 350 Interferometer 6 2 6 3 1 General Data 6 2 6 3 2 Optics 6 4 6 4 TMS W 350 PC...

Page 5: ...the instrument safely WARNING Type and source of danger Indicates a dangerous situation or action which could lead to death or serious injury if this warning is not noticed Describes how to avoid the...

Page 6: ...ons Tampering with the instruments in any way is not necessary when using the equipment as intended and will invalidate the warranty Any use other than the one described here and in SECTION 2 1 is not...

Page 7: ...ing and lifting heavy system components Only lift system components in pairs or using a suitable lifting device Wear safety shoes Wear protective gloves 1 2 6 Personal Protective Equipment 1 2 7 Clean...

Page 8: ...devices are synchronized Always combine only synchronized devices 1 2 9 Disposal Instrument Unless otherwise specified defective or no longer required instruments and their components must be properl...

Page 9: ...D is switched on using the mains switch on the device Beam exit aperture The position of the beam exit aperture on the instrument is shown in the following figure Figure 1 1 Position of beam exit aper...

Page 10: ...ARNING Electric shock caused by applied voltage Always disconnect the instrument from the power before you are maintaining or cleaning it WARNING Fire risk caused by wrong fuses Replace defective fuse...

Page 11: ...ect mains connection and intended use exposure to electric current is prevented by the closed grounded metal housing The device is subject to EU Directive 2004 108 EC EMC Directive and therefore compl...

Page 12: ...1 8 1 Safety Information...

Page 13: ...a 3D topography measurement system for optical non contact acquisition of the structure of rough and also reflective surfaces The TMS 350 measurement system is shown in the following figure Figure 2...

Page 14: ...path length difference between the reference mirror and the corresponding points on the test sample is zero During this measurement run depending on the topography of the test sample the software fin...

Page 15: ...TFT monitor with power supply and mains cable Supply cable Supply Special Ethernet cable for the connection of the camera Piezo cable from the controller to the interferometer Piezo 2 mains cables TMS...

Page 16: ...loose screws damaged components etc 3 In the case of a wrong delivery damage or missing parts immediately inform your local Polytec representative stating the serial numbers of the instruments The se...

Page 17: ...and Connections 3 2 1 Controller Front view The front view of the controller is shown in the following figure Figure 3 1 Front view of the controller 1 LED POWER indicator LED lit up ready to operate...

Page 18: ...R connector 7 pin circular jack Connection for the supply cable to the interferometer for the interferometer mains supply 6 USB interface Universal Serial Bus type B Connector to connect the piezo con...

Page 19: ...ront view The front view of the interferometer is shown in the following figure Figure 3 3 View of the interferometer 1 Reference filter Filter to adjust the intensity of the reference light to the in...

Page 20: ...PIEZO SENSOR connector Sub D jack with two coaxial applications Connection for the piezo cable Piezo from the controller to control the piezo 4 VIDEO connection Connection for the video camera cable E...

Page 21: ...rom the bottom of the interferometer is shown in the following figure Figure 3 5 Bottom view of the interferometer 1 Fitting hole 2 Mounting thread M6 Three mounting threads for the assembly of the in...

Page 22: ...ready to operate 3 HDD LED LED yellow Hard disk drive HDD in PC active 4 RESET key Reset and restart PC 5 DVD burner For an exact description of the DVD burner see the manufacturer s manual 6 POWER k...

Page 23: ...e to transmit the video from the video camera in the sensor head 7 MONITOR connection DVI jack Connection for the monitor cable to the TFT monitor 8 USB interfaces Universal Serial Bus type A Alternat...

Page 24: ...he housing it leads to heat accumulation This will overheat the electronic parts inside the device and may result in a defect Always keep free all air inlets and outlets of the device Keep at least 50...

Page 25: ...sealed with protective film The moisture indicator on the desiccant cartridge shows you when it needs to be changed The moisture indicator changes color once the desiccant cartridge is saturated and c...

Page 26: ...All the cabling is also shown in FIGURE 3 8 Secure the connections appropriately Should any cabling problems occur contact your local Polytec representative WARNING Electric shock caused by applied h...

Page 27: ...back page of the corresponding users manual PC 1 Connect up the keyboard to the KEYBOARD circular jack on the back of the PC 2 Connect up the mouse to one of the USB connections on the back of the PC...

Page 28: ...oops Proceed as follows 8 Connect up a mains cable to the TFT monitor and to a multiple socket 9 Connect up a mains cable to the back of the controller and to a multiple socket 10 Connect up a mains c...

Page 29: ...O SENSOR PIEZO SENSOR SUPPLY SENSOR POWER WARNING Disconnet Mains before opening ACHTUNG Vor dem ffnen Netzstecker ziehen I O KEYBOARD KEYBOARD MOUSE MOUSE VIDEO VIDEO MONITOR MONITOR SUPPLY SENSOR VI...

Page 30: ...POWER key on the front INFORMATION Ensure that all instruments are switched on before you start the software 4 Start the TMS software as described in your TMS software manual The video camera is worki...

Page 31: ...bringing the mains switch on the back to position I and press the POWER key on the front Object align 3 First of all position the object so that the AOI is approximately aligned towards the beam exit...

Page 32: ...N 4 3 additional measurement inaccuracies in the range of less than 1 m can occur To compensate this error please proceed as follows 1 Position a high precision optical flat e g a 20 plate available a...

Page 33: ...ement inaccuracies which have occurred due to the reference filter being exchanged have been compensated for 4 3 Reference Filter Exchange With the reference filter you can adjust the intensity of the...

Page 34: ...fer to the following picture 2 Carefully lift the reference filter 2 out of the interferometer Take care that the O ring for the sealing at the reference filter slot does not shift Figure 4 1 Exchangi...

Page 35: ...ometer INFORMATION Hand tighten means Tighten the screw firmly so that it can not undo itself Do not use any excess force and avoid damaging the thread INFORMATION If you have exchanged the reference...

Page 36: ...4 6 4 Measuring...

Page 37: ...r malfunctions can not be solved by the measures described here or if faults malfunctions occur which are not mentioned here please contact our service department Based on your fault description furth...

Page 38: ...prox 40 mm by slowly changing the distance between the interferometer and the object until the interferences are visible in the software If you now move the piezo position in the software and the inte...

Page 39: ...otobiological safety of lamps and lamp systems Risk category 1 Electrical safety IEC EN 61010 1 2011 07 Safety requirements for electrical equipment for measurement control and laboratory use EMC IEC...

Page 40: ...Voltage range for piezo control 20VDC 120VDC from the controller Operating temperature 5 C 40 C 41 F 104 F Storage temperature 10 C 65 C 14 F 149 F Relative humidity max 80 non condensing Dimensions...

Page 41: ...running M6 x 6 6 3 x 11 1 112 5 HELICOIL tangfree free running M6 x 6 6 3 x 11 1 63 0 5 86 89 225 92 89 120 100 25 175 107 HELICOIL tangfree free running M6 x 6 6 3 x 11 1 3 x M5 6H x 11 15 2 Beam 0 0...

Page 42: ...nm Typical flatness measurement6 Average flatness deviation 14 nm 125 nm 15 nm 210 nm Measurement error flatness measurement 25 nm 210 nm 25 nm 350 nm Repeatability 1 nm 35 nm 2 nm 50 nm Reproducibil...

Page 43: ...pth setting standard type A1 ISO 5436 118 sampling increment Nominal measurement speed 18 m s Nominal groove depth m 5 50 450 Expanded uncertainty of measurement 2 2 Interval limit of a confidence ran...

Page 44: ...F 104 F Storage temperature 10 C 65 C 14 F 149 F Air humidity max 80 non condensing Dimensions w x h x d Without angle brackets 450 mm x 190 mm x 550 mm 19 84TE 4HE With angle brackets 485 mm x 190 m...

Page 45: ...et consists of Depth setting standard calibration standard Calibration certificate The depth setting standard is shown in FIGURE A 1 Figure A 1 View of the depth setting standard The depth setting sta...

Page 46: ...ION If you define just one standard you will not have to select a standard later during calibration INFORMATION To define depth setting standards you need write permissions in the directory C Program...

Page 47: ...n isolated table because the measurement results could be affected or falsified 2 Position the depth setting standard so that the AOI is aligned towards the aperture of the light and is as parallel as...

Page 48: ...rd proceed as follows 8 Determine the ambient temperature INFORMATION To have no negative effect on the calibration results determine the temperature as precisely as possible 9 Use the measurement seq...

Page 49: ...file name is arbitrary The names of the device and the standard have to be given in the same way they have been entered in the dialog When entering the temperature you have to pay attention that the...

Page 50: ...and click OK INFORMATION To apply the correct value for the ambient temperature use a comma as the decimal separator The Select Device dialog appears Figure A 7 Select Device dialog 4 Select TMS I 35...

Page 51: ...e measurement The expanded measurement uncertainty is determined according to the Guide of the Expression of Uncertainty in Measurement ISO 1995 German version DIN V ENV 13005 1999 To calculate the ex...

Page 52: ...alue is specified for the measurement value deviation To attain a high level of confidence on compliance with the tolerance values a worst case consideration is carried out by adding the value of the...

Page 53: ...B 1 B Declaration of Conformity Appendix B Declaration of Conformity Figure B 1 Declaration of conformity for TMS 350...

Page 54: ...B 2 B Declaration of Conformity...

Page 55: ...ntroller back panel 3 4 curves compensate for 4 2 D declaration of conformity B 1 depth setting standard define A 2 evaluate measurements A 5 evaluation method A 7 make measurements A 3 desiccant cart...

Page 56: ...ating principle 2 2 operating state indicator on the controller 3 3 operating temperature 6 2 controller specifications 6 1 PC specifications 6 6 P PC cabling 3 13 control elements front view 3 8 equi...

Page 57: ...5 1 U unpack components 3 1 unpacking 3 2 V video connection at interferometer 3 6 W warm up long term drift of interferometer 6 4 warning label at controller 3 4 weight controller specifications 6 1...

Page 58: ...iv...

Page 59: ...ierre Semard 92320 Ch tillon Tel 33 1 49 65 69 00 Fax 33 1 57 19 59 60 E mail info polytec fr Internet http www polytec fr Japan JP Polytec Japan 13th floor Arena Tower 3 1 9 Shinyokohama Kohoku ku Yo...

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