PI M-605 Series, User Manual

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10 Technical Data
M-605 High-Precision Linear Stage MP45E Version: 1.2.0 21
10.1 Specifications
10.1.1 Data Table
M-605.1DD M-605.2DD Unit
Active axes X X
Motion and positioning M-605.1DD M-605.2DD Unit
Travel range 25 50 mm
Integrated sensor Linear encoder Linear encoder
Sensor resolution 0.1 0.1 µm
Design resolution 0.1 0.1 µm
Minimum incremental motion 0.3 0.3 µm
Unidirectional repeatability 0.1 0.1 µm
Bidirectional repeatability 0.2 0.2 µm
Accuracy 1 1 µm
Pitch ±30 ±30 µrad
Yaw ±30 ±30 µrad
Velocity (max.) 30 30 mm/s
Reference switch repeatability 0.5 0.5 µm
Mechanical properties M-605.1DD M-605.2DD Unit
Drive screw Ball screw Ball screw
Drive screw pitch 1 1 mm
Load capacity (max.) 300 300 N
Push/pull force (max.) 20 / 20 20 / 20 N
Lateral force (max.) 100 100 N
10 Technical Data