7
Installing the high vacuum flange
– In case the rotor blocks suddenly, torque levels up to
66669900 N
Nm
m can occur which need to be absorbed by the
system and the high vacuum flange.
– For installing the turbomolecular pumps to the high
vacuum flange, the components listed in the following
m
mu
usstt be used exclusively. Otherwise the turbomolecular
pump may twist or tear off. The components for installing
the turbomolecular pumps are special designs from
Pfeiffer Vacuum
– The minimum strength of 170 N/mm
2
of the flange material
needs to be observed.
Installation is done as follows.
To reliably prevent the pump from twisting if the
rotor suddenly blocks, it is absolutely prohibited
to secure a pump with an ISO-K flange on a
vacuum chamber with an ISO-F flange or vice
versa. Both flanges m
mu
usstt b
be
e of the same type.
Installation with different flange types is carried
out at the user's own risk. Pfeiffer Vacuum shall
assume no liability whatsoever for any damage
or injuries resulting from this kind of
attachment.
WARNING
ISO-F to an ISO-F flange
For installing there exist three variants.
V
Va
arriia
an
ntt 11 -- H
He
exxa
ag
go
on
n ssc
crre
ew
w w
wiitth
h b
blliin
nd
d h
ho
olle
e
C
Coonnnneeccttiioonn nnoom
miinnaall-- D
De
essiig
gn
na
attiio
on
n
O
Orrd
de
err--n
nu
um
mb
be
err
d
diia
am
me
ette
err
DN 100 ISO-K/
Centering ring (coated)
PM 016 210 AU
DN 100 ISO-K
Centering ring (coated)
PM 016 211 AU
with splinter shield
Centering ring (coated)
PM 016 212 AU
with protective mesher
Bracket screws
PF 300 110 -T
(1166 pieces must be used)
DN 160 ISO-K/
Centering ring (coated)
PM 016 216 AU
DN 160 ISO-K
Centering ring (coated)
PM 016 217 AU
with splinter shield
Centering ring (coated)
PM 016 218 AU
with protective mesher
Bracket screws
PF 300 110 -T
(1144 pieces must be used)
C
Coonnnneeccttiioonn nnoom
miinnaall-- D
De
essiig
gn
na
attiio
on
n
O
Orrd
de
err--n
nu
um
mb
be
err
d
diia
am
me
ette
err
DN 100 ISO-F
Centering ring (coated)
PM 016 210 AU
Centering ring (coated)
PM 016 211 AU
with splinter shield
Centering ring (coated)
PM 016 212 AU
with protective mesher
Hexagon screws with
N 3024 428 1C
washer
N 3502 422 4P
(88 pieces each must be used)
DN 160 ISO-K/
Centering ring (coated)
PM 016 216 AU
DN 160 ISO-K
Centering ring (coated)
PM 016 217 AU
mit Splitterschutz
Centering ring (coated)
PM 016 218 AU
mit Schutzgitter
Hexagon screws
N 3024 479 1C
(88 pieces must be used)
ISO-K to an ISO-K flange
For installation, the following components are available.
A
D oder/or E
B
C
Bracket screw
A
ISO-K flange
B
Bracket screw
C
Centering ring, coated
D
Splinter shield
E
Protective mesh
➡
The clamps need to be tightened crosswise in three steps.
Tightening torque: 5 Nm, 15 Nm, 25 ±2 Nm
1) DN 100 ISO-F with washer
➡
For a flange material having a strength of > 270 N/mm
2
and
with a blind hole the hexagon screw 1,5 d must be screwed
in. The hexagon screws must be tightened crosswise in
three steps.
Tightening torque:
DN 100 ISO-F: 5 Nm, 12 Nm, 22 ±2 Nm
DN 160 ISO-F: 10 Nm, 20 Nm, 38 ±3 Nm
B
A
D oder/or E
1
.5d
C
Hexagon srew with blind hole
A
ISO-F flange
B
Hexagon screw
1)
C
Centering ring, coated
D
Splinter shield
E
Protective mesh
