2
Index
Page
Page
1.
Safety Instructions .................................. 3
1.1. For Your Orientation........................................................... 3
1.2. Pictogram Definitions........................................................ 3
2.
Understanding The Pumps
TMH 521 P/TMU 521 P ............................. 4
2.1. Main Features..................................................................... 4
Proper Use .......................................................................... 4
Improper Use ...................................................................... 5
2.2. Differences Between The Pump Types.......................... 5
2.3. Scope of Delivery............................................................... 5
3.
Installation ............................................... 6
3.1. Preparations For Installation............................................ 6
3.2. Installing The Pump,
Connecting The High Vacuum Side ................................ 6
3.3. Connecting The Fore-Vacuum Side ................................ 9
3.4. Connecting The Cooling Unit.......................................... 10
3.5. Connecting The Venting Valve....................................... 10
3.6. Connecting The Casing Heating Unit............................ 10
3.7. Connecting The Sealing Gas Valve............................... 10
3.8. Connecting The Electronic Drive Unit TC 600.............. 11
3.9. Installing The Power Supply .......................................... 11
3.10. Connecting The Remote Control Unit ........................... 12
3.11. Connecting The Serial Interface RS 485 ...................... 13
Connection ........................................................................ 13
Connecting The RS 485 ................................................... 13
3.12. Connections Diagram...................................................... 14
4.
Operations .............................................. 15
4.1. Before Switching ON....................................................... 15
4.2. Switching ON.................................................................... 15
4.3. Switching OFF And Venting............................................ 15
4.4. Gas Type Dependent Operations .................................. 16
4.5. Shutting Down For Longer Periods ............................... 16
4.6. Operations With The DCU 001, DCU 300
or HPU 001......................................................................... 17
4.7. Operations With The Remote Control Unit................... 17
Venting Release (Optional)............................................. 17
Motor, Turbopump ........................................................... 17
Pumping Station ............................................................... 17
Heating/Reset ................................................................... 17
Standby.............................................................................. 17
Rotation Speed Setting Mode Via
Input PWM ........................................................................ 18
Switching Outputs............................................................ 18
5.
Monitoring Operations .......................... 19
5.1. Operations Display Via LED............................................ 19
5.2. Turbopump Temperature Management....................... 19
6.
What To Do In Case Of
Breakdowns ? ........................................ 20
7.
Maintenance/Replacement .................. 21
7.1. Replacing The Lubricant Reservoir............................... 21
7.2. Replacing The Electronic Drive Unit TC 600 .................22
8.
Service .................................................... 23
9.
Technical Data ....................................... 24
9.1. Dimensions Diagram ....................................................... 25
10. Spare Parts ............................................. 28
11. Accessories............................................ 29
Declaration of Contamination..................... 30
Manufacturer’s Declaration .......... (last page)
P
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e:: Current operating instructions are available via
www.pfeiffer-vacuum.net.
